H01J 37/18
Vacuum locks
Official title: Vacuum locks {; Means for obtaining or maintaining the desired pressure within the vessel}
H01J37/18 (Vacuum locks) appears on 623 US grants and 569 published applications in this corpus.
Search patents in H01J- Granted patents
- 623
- Published applications
- 569
- Assignees
- 258
- Inventors
- 1,473
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 6 | 0 |
| 1977 | 5 | 0 |
| 1978 | 7 | 0 |
| 1979 | 5 | 0 |
| 1980 | 5 | 0 |
| 1981 | 3 | 0 |
| 1982 | 5 | 0 |
| 1983 | 3 | 0 |
| 1984 | 8 | 0 |
| 1985 | 14 | 0 |
| 1986 | 4 | 0 |
| 1987 | 12 | 0 |
| 1988 | 5 | 0 |
| 1989 | 10 | 0 |
| 1990 | 3 | 0 |
| 1991 | 10 | 0 |
| 1992 | 9 | 0 |
| 1993 | 4 | 0 |
| 1994 | 6 | 0 |
| 1995 | 4 | 0 |
| 1996 | 3 | 0 |
| 1997 | 2 | 0 |
| 1998 | 12 | 0 |
| 1999 | 6 | 0 |
| 2000 | 7 | 0 |
| 2001 | 5 | 1 |
| 2002 | 7 | 15 |
| 2003 | 10 | 11 |
| 2004 | 9 | 10 |
| 2005 | 6 | 10 |
| 2006 | 16 | 9 |
| 2007 | 12 | 20 |
| 2008 | 9 | 15 |
| 2009 | 10 | 13 |
| 2010 | 8 | 15 |
| 2011 | 10 | 18 |
| 2012 | 7 | 22 |
| 2013 | 19 | 20 |
| 2014 | 28 | 25 |
| 2015 | 20 | 52 |
| 2016 | 36 | 36 |
| 2017 | 33 | 38 |
| 2018 | 31 | 24 |
| 2019 | 30 | 24 |
| 2020 | 30 | 27 |
| 2021 | 19 | 31 |
| 2022 | 29 | 28 |
| 2023 | 21 | 24 |
| 2024 | 19 | 31 |
| 2025 | 18 | 22 |
| 2026 | 23 | 28 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Focused ion beam apparatus and control method thereof29 Sep 2026US 12,749,647 B2Samsung Electronics Co., Ltd.
- Laser thermal epitaxy in a charged particle microscope15 Sep 2026US 12,738,446 B2FEI Company
- Vacuum processing device15 Sep 2026US 12,738,447 B2Hitachi High-Tech Corporation
- Transmission electron microscope25 Aug 2026US 12,719,011 B2Hitachi High-Tech Corporation
- Air bearing shaft with wide operating temperature range11 Aug 2026US 12,706,271 B2APPLIED Materials.Inc.
- Charged particle beam devices and membrane assemblies useful therein8 Oct 2026US 2026/0311957 A1Airsem Technologies Ltd.
- Sample chamber heating assembly1 Oct 2026US 2026/0302127 A1
- Apparatus and method for transferring modular functional units10 Sep 2026US 2026/0269172 A1
- Charged Particle Beam System and Control Method Therefor10 Sep 2026US 2026/0269173 A1Hitachi High-Tech Corporation
- Workstation, preparation station and method for manipulating an electron microscopy grid assembly3 Sep 2026US 2026/0260839 A1Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V.
Most cited
By later US patents
- Vacuum processing apparatus289US 4,816,638 AAnelva Corporation · 1989
- Vacuum pumping system for a sputtering device133US 5,788,825 ASamsung Electronics Co., Ltd. · 1998
- Method for inspecting substrate, substrate inspecting system and electron beam apparatus113US 7,109,483 B2Ebara Corporation · 2006
- System for driving rotary member in vacuum87US 4,383,178 AHitachi, Ltd. · 1983
- Method of removing residual corrosive compounds by plasma etching followed by washing87US 5,007,981 AHitachi, Ltd. · 1991