Apparatus and method for transferring modular functional units

The transfer system of 1, further comprising a first receiving apparatus, a second receiving apparatus, a third receiving apparatus and a fourth receiving apparatus, wherein:

• the first functional unit is receivable in the first position via the first receiving apparatus;
• the first functional unit is receivable in the second position via the second receiving apparatus;
• the second functional unit is receivable in the third position via the third receiving apparatus;
• the fourth functional unit is receivable in the second position via the fourth receiving apparatus;
• and
• each of the first and second functional units are able to be handed over between a respective receiving apparatus and the transfer unit.

The transfer system of 1, further comprising a first receiving apparatus, a second receiving apparatus, a third receiving apparatus and a fourth receiving apparatus, wherein:

• the first is a parked position;
• the third position is a parked position;
• the second position is a working position;
• the fourth position is a working position;
• the first functional unit is receivable in the first position via the first receiving apparatus;
• the first functional unit is receivable in the second position via the second receiving apparatus;
• the second functional unit is receivable in the third position via the third receiving apparatus;
• the fourth functional unit is receivable in the second position via the fourth receiving apparatus;
• and
• each of the first and second functional units are able to be handed over between a respective receiving apparatus and the transfer unit.

The transfer system of 1, further comprising a first receiving apparatus, a second receiving apparatus, a third receiving apparatus and a fourth receiving apparatus, wherein:

• the first is a parked position;
• the third position is a parked position;
• the second position is a working position;
• the fourth position is a working position;
• the first functional unit is receivable in the first position via the first receiving apparatus;
• the first functional unit is receivable in the second position via the second receiving apparatus;
• the second functional unit is receivable in the third position via the third receiving apparatus;
• the fourth functional unit is receivable in the second position via the fourth receiving apparatus;
• each of the first and second functional units are able to be handed over between a respective receiving apparatus and the transfer unit;
• and
• the first and second functional units have a substantially identical design.

The transfer system of 1, further comprising a first receiving apparatus, a second receiving apparatus, a third receiving apparatus and a fourth receiving apparatus, wherein:

• the first is a parked position;
• the third position is a parked position;
• the second position is a working position;
• the fourth position is a working position;
• the first functional unit is receivable in the first position via the first receiving apparatus;
• the first functional unit is receivable in the second position via the second receiving apparatus;
• the second functional unit is receivable in the third position via the third receiving apparatus;
• the fourth functional unit is receivable in the second position via the fourth receiving apparatus;
• each of the first and second functional units are able to be handed over between a respective receiving apparatus and the transfer unit;
• and
• a design of the first functional unit is different from a design of the second functional unit.

The transfer system of 1, further comprising a first receiving apparatus, a second receiving apparatus, a third receiving apparatus and a fourth receiving apparatus, wherein:

• the first is a parked position;
• the third position is a parked position;
• the second position is a working position;
• the fourth position is a working position;
• the first functional unit is receivable in the first position via the first receiving apparatus;
• the first functional unit is receivable in the second position via the second receiving apparatus;
• the second functional unit is receivable in the third position via the third receiving apparatus;
• the fourth functional unit is receivable in the second position via the fourth receiving apparatus;
• each of the first and second functional units are able to be handed over between a respective receiving apparatus and the transfer unit;
• and
• the first and second functional units are reversibly couplable to one another.

A method, comprising:

• coupling a transfer unit with a first functional unit and using the transfer unit to transfer the first functional unit from a first parked position in a vacuum region of a particle beam microscope to a first working position in the vacuum region of the particle beam microscope;
• uncoupling the transfer unit from the first functional unit;
• coupling the transfer unit with the second functional unit and using the transfer unit to transfer the second functional unit from a second parked position in the vacuum region of the particle beam microscope to a second working position in the vacuum region of the particle beam microscope;
• uncoupling the transfer unit from the second functional unit;
• using the first functional unit to a function and using the second functional unit to execute a function.