Charged Particle Beam System and Control Method Therefor

Abstract

To utilize an existing sample stage as it is and increase the efficiency of sample transport, the present disclosure provides a charged particle beam system including: a sample exchange chamber for exchanging a sample transported to an observation chamber; and a computer configured to control transport of the sample from the sample exchange chamber to the observation chamber, in which the sample exchange chamber includes a multi-sample table that includes an extrusion mechanism for extruding a sample and on which a plurality of samples are placeable, and a transport mechanism configured to move the multi-sample table between the sample exchange chamber and the observation chamber, and the computer executes a process of controlling the transport mechanism to transport the multi-sample table into the observation chamber, a process of controlling the extrusion mechanism to place one sample on a sample placement portion of the observation chamber from the multi-sample table transported to the observation chamber, and a process of controlling the transport mechanism to retract the multi-sample table from the observation chamber to the sample exchange chamber after placing the one sample on the sample placement portion (refer to FIG. 2).

Dependencies are inferred from the claim text.