Transmission electron microscope
AssigneeHitachi High-Tech Corporation
InventorsAkinari Hanawa, Toshie Yaguchi, Hideki Kikuchi
Life of this patent
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Abstract
An object of the invention is to reduce influence of a phase contrast on an observation image in a transmission electron microscope and to enable image observation with high magnification and high resolution. The transmission electron microscope according to the invention can switch between a first mode in which a lens barrel is airtightly sealed between an electron beam source side and a stage side by a diaphragm, and a second mode in which the lens barrel is not airtightly sealed.
Claims6
A transmission electron microscope for observing a sample using an electron beam transmitted through the sample, the transmission electron microscope comprising:
- an electron beam source configured to emit the electron beam;
- a stage on which the sample is placed;
- a lens barrel configured to house the electron beam source and the stage;
- a diaphragm configured to airtightly seal a first space on an electron beam source side and a second space on a stage side inside the lens barrel;
- and
- a mechanism configured to move the diaphragm;
- and
- an irradiation lens configured to focus the electron beam between the electron beam source and the stage, wherein
- the diaphragm is disposed between the electron beam source and the irradiation lens,
- the diaphragm includes a transmission portion that transmits at least a part of the electron beam,
- the mechanism includes a movement mechanism different from a stage mechanism for moving or inclining the stage, and
- the mechanism is configured to switch between:
- a first mode in which the diaphragm is disposed at a first position at which the diaphragm airtightly seals the first space and the second space and transmits at least a part of the electron beam;
- and
- a second mode in which the diaphragm is disposed at a second position at which the diaphragm does not airtightly seal the first space and the second space and does not collide with the electron beam.
Dependencies are inferred from the claim text.