H01J 37/185
Means for transferring objects between different enclosures of different pressure or atmosphere
Official title: {Means for transferring objects between different enclosures of different pressure or atmosphere}
H01J37/185 (Means for transferring objects between different enclosures of different pressure or atmosphere) appears on 201 US grants and 208 published applications in this corpus.
Search patents in H01J- Granted patents
- 201
- Published applications
- 208
- Assignees
- 95
- Inventors
- 483
- Latest grant
- 9 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 4 | 0 |
| 1988 | 2 | 0 |
| 1989 | 5 | 0 |
| 1990 | 1 | 0 |
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 4 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 1 |
| 2002 | 1 | 12 |
| 2003 | 4 | 1 |
| 2004 | 3 | 5 |
| 2005 | 1 | 3 |
| 2006 | 9 | 5 |
| 2007 | 8 | 11 |
| 2008 | 7 | 9 |
| 2009 | 2 | 6 |
| 2010 | 6 | 8 |
| 2011 | 8 | 8 |
| 2012 | 3 | 7 |
| 2013 | 8 | 10 |
| 2014 | 16 | 11 |
| 2015 | 7 | 17 |
| 2016 | 9 | 7 |
| 2017 | 12 | 10 |
| 2018 | 8 | 7 |
| 2019 | 8 | 6 |
| 2020 | 9 | 10 |
| 2021 | 7 | 9 |
| 2022 | 8 | 11 |
| 2023 | 8 | 8 |
| 2024 | 7 | 9 |
| 2025 | 7 | 7 |
| 2026 | 4 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Charged particle beam device and sample analysis method9 Jun 2026US 12,651,723 B2Hitachi High-Tech Corporation
- Workstation, preparation station and method for manipulating an electron microscopy grid assembly17 Mar 2026US 12,580,149 B2Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V.
- Immunostaining method, sample exchange chamber, and charged particle beam apparatus10 Feb 2026US 12,546,687 B2Hitachi High-Tech Corporation
- Etching method, plasma processing apparatus, and processing system27 Jan 2026US 12,537,159 B2Tokyo Electron Limited
- Specimen processing holder and specimen processing method25 Nov 2025US 12,482,629 B2JEOL Ltd.
- Apparatus and method for transferring modular functional units10 Sep 2026US 2026/0269172 A1
- Charged Particle Beam System and Control Method Therefor10 Sep 2026US 2026/0269173 A1Hitachi High-Tech Corporation
- Workstation, preparation station and method for manipulating an electron microscopy grid assembly3 Sep 2026US 2026/0260839 A1Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V.
- Method for operating a particle beam system, and particle beam system13 Aug 2026US 2026/0237592 A1
- Charged Particle Beam Device and Method for Producing and Observing Sample Piece6 Aug 2026US 2026/0229446 A1Hitachi High-Tech Corporation
Most cited
By later US patents
- Vacuum processing apparatus289US 4,816,638 AAnelva Corporation · 1989
- Method for inspecting substrate, substrate inspecting system and electron beam apparatus113US 7,109,483 B2Ebara Corporation · 2006
- Method of removing residual corrosive compounds by plasma etching followed by washing87US 5,007,981 AHitachi, Ltd. · 1991
- Electron beam lithography apparatus with self actuated vacuum bypass valve74US 6,724,001 B1International Business Machines Corporation · 2004
- Vacuum processing unit and apparatus72US 4,824,309 AHitachi, Ltd. · 1989