Specimen processing holder and specimen processing method
AssigneeJEOL Ltd.
InventorsYoshikazu Sasaki, Tomohisa Fukuda, Tomohiro Mihira, Norimasa Sakuta, Misumi Kadoi, Tatsuhito Kimura
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Abstract
A holder includes a first sub holder configured to hold a primary specimen, and a second sub holder configured to hold a support member. The primary specimen is processed in a first state where the holder is disposed within a first specimen processing apparatus. Subsequently, in a second state where the holder is disposed within a second specimen processing apparatus, a secondary specimen is prepared from the primary specimen, the secondary specimen is moved onto the support member, and a thin film specimen is prepared from the secondary specimen.
Claims12
A specimen processing holder comprising:
- a holder body;
- a first sub holder disposed on the holder body and including sing a shield member configured to partially block a first ion beam to generate a shaped first ion beam, the first sub holder configured to hold a primary specimen to be processed with the shaped first ion beam;
- and
- a second sub holder disposed on the holder body, the second sub holder configured to hold a secondary specimen prepared by processing the primary specimen with a second ion beam.
A specimen processing method comprising:
- providing a specimen processing holder comprising a first sub holder configured to hold a primary specimen and a second sub holder configured to hold a support member;
- processing the primary specimen in a first state where the specimen processing holder is disposed within a first specimen chamber of a first specimen processing apparatus;
- after the processing of the primary specimen, transferring the specimen processing holder from the first specimen chamber into a second specimen chamber of a second specimen processing apparatus;
- preparing a secondary specimen from the processed primary specimen in a second state where the specimen processing holder is disposed within the second specimen chamber;
- moving the secondary specimen onto the support member in the second state;
- and
- preparing an observation specimen from the secondary specimen disposed on the support member.
Dependencies are inferred from the claim text.