Sample chamber heating assembly
OwnerLibor Novák, Jan Lásko +2inventors
InventorsLibor Novák, Jan Lásko, Tomáš Musálek, Miroslav Kolibal
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Abstract
A heating assembly for use in a charged particle beam system. The heating assembly includes a reactor system defining a reactor chamber configured to house a sample and including a reactor heater configured to heat the sample, where the reactor system defines an aperture configured to receive a charged particle beam. The heating system also includes a crucible system that includes a precursor housing defining a precursor volume configured to house a precursor, where the precursor volume is in fluid communication with the reactor chamber, and a heating element configured to heat the precursor.
Claims20
A heating assembly for use in a charged particle system comprising:
- a reactor system defining a reactor chamber configured to house a sample and including a reactor heater configured to heat the sample, wherein the reactor system defines an aperture configured to receive a charged particle beam;
- and
- a crucible system including:
- a precursor housing defining a precursor volume configured to house a precursor, wherein the precursor volume is in fluid communication with the reactor chamber;
- and
- a heating element configured to heat the precursor.
A charged particle system comprising:
- a beam column;
- and
- a sample chamber that houses:
- a reactor system defining a reactor chamber and including a reactor heater, wherein a beam axis is defined from the beam column into the reactor chamber, wherein the reactor system defines an aperture aligned with the beam axis;
- and
- a crucible system including a precursor housing in fluid communication with the reactor chamber and a heating element.
A method of using a charged particle system comprising:
- emitting a charged particle beam through a beam column, and an aperture defined by a reactor chamber of a reactor system, onto a sample housed in the reactor chamber, wherein the reactor system is positioned in a sample chamber and includes a reactor heater;
- activating the reactor heater to heat the sample;
- and
- activating a heating element of a crucible system positioned in the sample chamber to heat a precursor housed in a precursor housing of the crucible system such that the precursor emits a precursor gas that flows into the reactor chamber, wherein the precursor housing is in fluid communication with the reactor chamber.
Dependencies are inferred from the claim text.