H01J 37/045
Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the
Official title: {Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge}
H01J37/045 (Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the) appears on 386 US grants and 423 published applications in this corpus.
Search patents in H01J- Granted patents
- 386
- Published applications
- 423
- Assignees
- 103
- Inventors
- 703
- Latest grant
- 22 Sep 2026
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| Year | Granted patents | Published applications |
|---|---|---|
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| 1982 | 0 | 0 |
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| 2002 | 2 | 1 |
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| 2004 | 4 | 4 |
| 2005 | 6 | 6 |
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| 2007 | 8 | 16 |
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| 2023 | 18 | 30 |
| 2024 | 10 | 20 |
| 2025 | 10 | 23 |
| 2026 | 14 | 17 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Multi-charged particle beam irradiation apparatus and multi-charged particle beam irradiation method23 Jul 2026US 2026/0213113 A1NuFlare Technology, Inc.
- Abnormality diagnosis method for blanking aperture array substrate and multi-beam writing method2 Jul 2026US 2026/0188609 A1NuFlare Technology, Inc.
Most cited
By later US patents
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- Charged-particle beam exposure system and method67US 6,064,807 AFujitsu Limited · 2000
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