Charged particle beam device

A charged particle beam device comprising:

• a stage where a sample is mountable;
• a charged particle gun performing charged particle emission to the sample;
• a voltage source configured to generate negative voltage;
• and
• a blanking control circuit configured to receive a blanking control signal,
• wherein the blanking control circuit includes
• a common ground;
• a first resistor to which a voltage is supplied from the voltage source;
• a first transistor switch having one end connected to the common ground;
• a second transistor switch having one end connected to the common ground;
• a second resistor to which a voltage is supplied from the voltage source;
• a first blanking electrode connected to the first resistor and the first transistor switch circuit;
• a second blanking electrode facing the first blanking electrode and connected to the second transistor switch and the second resistor;
• and
• a control circuit controlling the first resistor, the first transistor switch, the second transistor switch, the second resistor,
• wherein a terminal of each of the first and second transistor switches connected to the common ground is a source terminal or an emitter terminal, and
• wherein, the first resistor, the first transistor switch, the second transistor switch, and the second resistor are arranged to prevent an electric field from being formed between the first blanking electrode and the second blanking electrode due to a power supply noise introduced through the voltage source and a ground noise introduced through the common ground, by causing one of the power supply noise and the ground noise to be present at both of the first blanking electrode and the second blanking electrode with a same amplitude and phase when the received blanking control signal is in an OFF state.

A charged particle beam device comprising:

• a stage where a sample is mountable;
• a charged particle gun performing charged particle emission to the sample;
• a voltage source configured to generate negative voltage;
• and
• a blanking control circuit configured to receive a blanking control signal,
• wherein the blanking control circuit includes
• a common ground;
• a first transistor switch to which a voltage is supplied from the voltage source;
• a first resistor having one end connected to the common ground;
• a second resistor having one end connected to the common ground;
• a second transistor switch to which a voltage is supplied from the voltage source;
• a first blanking electrode connected to the first resistor and the first transistor switch circuit;
• a second blanking electrode facing the first blanking electrode and connected to the second transistor switch and the second resistor;
• and
• a control circuit controlling the first transistor switch and the second transistor switch,
• wherein a terminal of each of the first and second transistor switches connected to the voltage source is a source terminal or an emitter terminal, and
• wherein, the first resistor, the first transistor switch, the second transistor switch, and the second resistor are arranged to prevent an electric field from being formed between the first blanking electrode and the second blanking electrode due to a power supply noise introduced through the voltage source and a ground noise introduced through the common ground, by causing one of the power supply noise and the ground noise to be present at both of the first blanking electrode and the second blanking electrode with a same amplitude and phase when the received blanking control signal is in an OFF state.