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US 12,738,451 B2Granted
Charged particle beam apparatus
AssigneeHitachi High-Tech Corporation
InventorsHideki Tsushima, Naoya Ishigaki
Life of this patent
Estimating the term…
Abstract
A charged particle beam device according to the present invention comprises a charged particle source that emits charged particles, a detection circuit that detects electrons which are generated by a sample as a result of irradiation with the charged particles, and a power storage device (107_VHD) that holds direct voltage, and comprises a charge circuit (107_CHG) that charges the power storage device with supplied voltage, and a control circuit (107_CTL) that controls the charge circuit such that charging is carried out in a period in which no sample is measured, wherein the direct voltage held by the power storage device (107_VHD) is used as operating voltage.
Claims11
A charged particle beam apparatus comprising:
- a charged particle gun configured to emit a charged particle;
- a detection circuit configured to detect an electron generated in a sample when the sample is irradiated with the charged particle in a period during which the sample is measured;
- a charge circuit including a power storage device configured to store a DC voltage, wherein the charge circuit charges the power storage device with a supplied voltage;
- and
- a control circuit configured to control the charge circuit so that the charging is performed in a period during which the sample is not measured, rather than in a period during which the sample is measured,
- wherein, the charged particle gun, in which the DC voltage stored in the power storage device is supplied as an operating voltage, generates the charged particle based on the supplied DC voltage, and
- wherein the control circuit specifies a non-measurement period using at least one of a blanking signal that controls the charged particle so as not to be irradiated onto the sample and a movement signal that controls stage conveyance of the sample, and controls charging of the power storage device during the specified non-measurement period.
4 more elements
A charged particle beam apparatus, comprising:
- a charged particle gun configured to emit a charged particle;
- a detection circuit configured to detect an electron generated in a sample when the sample is irradiated with the charged particle in a period during which the sample is measured;
- a charge circuit including a power storage device configured to store a DC voltage, wherein the charge circuit charges the power storage device with a supplied voltage;
- a control circuit configured to control the charge circuit so that the charging is performed in a period during which the sample is not measured;
- and
- a deflection control circuit configured to deflect the charged particle based on a synchronization signal so as to two-dimensionally scan the sample,
- wherein the DC voltage stored in the power storage device is supplied as an operating voltage, and
- wherein the synchronization signal is supplied to the control circuit, and the control circuit instructs the charge circuit to charge the power storage device in a non-measurement period indicated by the synchronization signal,
- the charged particle beam apparatus further comprising a blanking control circuit configured to perform a control operation according to a blanking signal so that the sample is not irradiated with the charged particle,
- wherein the blanking signal is supplied to the control circuit, and the control circuit instructs the charge circuit to charge the power storage device in a period controlled by the blanking signal so that the sample is not irradiated with the charged particle.
7 more elements
A charged particle beam apparatus, comprising:
- a charged particle gun configured to emit a charged particle;
- a detection circuit configured to detect an electron generated in a sample when the sample is irradiated with the charged particle in a period during which the sample is measured;
- a charge circuit including a power storage device configured to store a DC voltage, wherein the charge circuit charges the power storage device with a supplied voltage;
- a control circuit configured to control the charge circuit so that the charging is performed in a period during which the sample is not measured;
- and
- a stage configured to convey the sample from a predetermined position to an irradiation position where the sample is irradiated with the charged particle,
- wherein the DC voltage stored in the power storage device is supplied as an operating voltage, and
- wherein a movement signal of controlling conveyance of the stage is supplied to the control circuit, and the control circuit instructs the charge circuit to charge the power storage device in a period during which the stage moves, in response to the movement signal, the sample from the predetermined position to the irradiation position.
5 more elements
A charged particle beam apparatus, comprising:
- a charged particle gun configured to emit a charged particle;
- a detection circuit configured to detect an electron generated in a sample when the sample is irradiated with the charged particle in a period during which the sample is measured;
- a charge circuit including a power storage device configured to store a DC voltage, wherein the charge circuit charges the power storage device with a supplied voltage;
- a control circuit configured to control the charge circuit so that the charging is performed in a period during which the sample is not measured;
- and
- a deflection control circuit configured to deflect the charged particle so as to two-dimensionally scan the sample based on a synchronization signal,
- wherein the DC voltage stored in the power storage device is supplied as an operating voltage, and
- wherein the synchronization signal is supplied to the control circuit, and the control circuit controls the charge circuit so as to charge the battery during a long return period in the two-dimensional scanning.
5 more elements
Dependencies are inferred from the claim text.