Abnormality diagnosis method for blanking aperture array substrate and multi-beam writing method
AssigneeNuFlare Technology, Inc.
InventorsYoshihisa KAWABATA, Yasuo SENGOKU, Hideo INOUE, Takuya MATSUKAWA, Yusuke YOSHIDA
Life of this patent
Estimating the term…
Abstract
The present invention efficiently and accurately diagnoses abnormalities of blankers. An abnormality diagnosis method for a blanking aperture array substrate according to the present embodiment includes grouping the plurality of individual blankers into a plurality of groups, measuring blanking performance of the individual blankers for each group, and iteratively subdividing any group exhibiting abnormal blanking performance into subgroups to identify an individual blanker having abnormal blanking performance.
Claims14
An abnormality diagnosis method for a blanking aperture array substrate that uses a plurality of individual blankers to perform individual on/off control of beams corresponding to each of a plurality of beams, the method comprising:
- grouping the plurality of individual blankers into a plurality of groups and measuring blanking performance of the individual blankers for each of the groups;
- and
- dividing any group exhibiting abnormal blanking performance into a plurality of subgroups and measuring the blanking performance of the individual blankers for each of the subgroups.
Dependencies are inferred from the claim text.