H01J 37/026
Means for avoiding or neutralising unwanted electrical charges on tube components
Official title: {Means for avoiding or neutralising unwanted electrical charges on tube components}
H01J37/026 (Means for avoiding or neutralising unwanted electrical charges on tube components) appears on 348 US grants and 294 published applications in this corpus.
Search patents in H01J- Granted patents
- 348
- Published applications
- 294
- Assignees
- 131
- Inventors
- 809
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 2 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 2 | 0 |
| 1987 | 3 | 0 |
| 1988 | 4 | 0 |
| 1989 | 6 | 0 |
| 1990 | 5 | 0 |
| 1991 | 5 | 0 |
| 1992 | 10 | 0 |
| 1993 | 1 | 0 |
| 1994 | 9 | 0 |
| 1995 | 10 | 0 |
| 1996 | 5 | 0 |
| 1997 | 2 | 0 |
| 1998 | 3 | 0 |
| 1999 | 6 | 0 |
| 2000 | 7 | 0 |
| 2001 | 2 | 0 |
| 2002 | 11 | 4 |
| 2003 | 13 | 4 |
| 2004 | 6 | 9 |
| 2005 | 7 | 8 |
| 2006 | 5 | 15 |
| 2007 | 10 | 16 |
| 2008 | 12 | 17 |
| 2009 | 17 | 17 |
| 2010 | 13 | 17 |
| 2011 | 14 | 8 |
| 2012 | 8 | 11 |
| 2013 | 14 | 10 |
| 2014 | 17 | 12 |
| 2015 | 14 | 18 |
| 2016 | 8 | 10 |
| 2017 | 13 | 9 |
| 2018 | 14 | 14 |
| 2019 | 8 | 11 |
| 2020 | 14 | 8 |
| 2021 | 6 | 9 |
| 2022 | 7 | 12 |
| 2023 | 9 | 14 |
| 2024 | 8 | 17 |
| 2025 | 4 | 14 |
| 2026 | 9 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Electron beam irradiation device18 Aug 2026US 12,712,143 B2Nhv Corporation
- Multi-beam pattern definition device28 Apr 2026US 12,614,695 B2IMS Nanofabrication GmbH
- Filament alignment device21 Apr 2026US 12,609,281 B2Samsung Electronics Co., Ltd.
- Multi charged particle beam writing method and multi charged particle beam writing apparatus31 Mar 2026US 12,592,360 B2NuFlare Technology, Inc.
- Apparatus for analyzing and/or processing a sample with a particle beam and method24 Mar 2026US 12,586,755 B2Carl Zeiss SMT GmbH
- Method, apparatus and system for characterizing energetic neutral component of a particle beam24 Sep 2026US 2026/0290741 A1Axcelis Technologies, Inc.
- Multi-beam charged particle microscope for inspection with reduced charging effects17 Sep 2026US 2026/0279715 A1
- System, methods, and apparatuses with reduced noise current30 Jul 2026US 2026/0221373 A1ASML Netherlands B. V.
- Charged particle beam device and inspection method using same2 Jul 2026US 2026/0188605 A1Hitachi High-Tech Corporation
- Cleaning system for cleaning an optical element of a charged particle evaluation system25 Jun 2026US 2026/0179873 A1Applied Materials Israel Ltd.
Most cited
By later US patents
- Process for surface treatment519US 4,857,137 AHitachi, Ltd. · 1989
- Method and apparatus for protection of conductive surfaces in a plasma processing reactor319US 5,366,585 AAPPLIED Materials.Inc. · 1994
- Apparatus and method for neutralizing the beam in an ion implanter90US 4,361,762 ARCA Corporation · 1982
- Focused ion beam processing86US 4,639,301 AMicrion Limited Partnership · 1987
- Ion implantation surface charge control method and apparatus72US 4,804,837 AEaton Corporation · 1989