System, methods, and apparatuses with reduced noise current
AssigneeASML Netherlands B.V.
InventorsValery RAY, Donald BENSON, Zhonghua DONG, Li LI
Life of this patent
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AssigneeASML Netherlands B.V.
InventorsValery RAY, Donald BENSON, Zhonghua DONG, Li LI
Estimating the term…
Systems and apparatuses may include at least three conductors including a first conductor that is electrically isolated from a chassis, the first conductor being electrically connected to a node of an AC power source, the node of the AC power source being electrically connected to a ground reference, and the first conductor configured to provide a path for noise current generated by the EMI filter to flow to the AC power source to enable the noise current to pass to the AC power source without passing through the chassis. Each conductor may include an inductor, the inductors being magnetically coupled such that a sum of currents flowing through the inductors is substantially zero. Systems may include shielded cables electrically connected to a chamber to provide a low-impedance path for noise currents to flow, wherein at a mechanical interface, a column is mechanically coupled to and electrically isolated from the chamber.
A system comprising:
A system comprising:
A system comprising:
Dependencies are inferred from the claim text.