Apparatus for analyzing and/or processing a sample with a particle beam and method
AssigneeCarl Zeiss SMT GmbH
InventorsOttmar Hoinkis, Jan Guentner, Daniel Rhinow, Hubertus Marbach, Nicole Auth
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Abstract
An apparatus for analyzing and/or processing a sample with a particle beam includes a providing unit for providing the particle beam, and a shielding element for shielding an electric field (E) generated by charges (Q) accumulated on the sample. The shielding element has a through opening for the particle beam to pass through towards the sample. The apparatus further includes a detecting unit configured to detect an actual position of the shielding element, and an adjusting unit for adjusting the shielding element from the actual position into a target position.
Claims20
An apparatus for analyzing and/or processing a sample with a particle beam, comprising:
- a providing unit for providing the particle beam;
- a shielding element for shielding an electric field (E) generated by charges (Q) accumulated on the sample when the shielding element is at a distance from the sample of at most 100 μm, wherein the shielding element has a through opening for the particle beam to pass through towards the sample;
- a detecting unit configured to detect an actual position of the shielding element;
- an adjusting unit for adjusting the shielding element from the actual position into a target position;
- and
- a securing device for securing the shielding element in a frictionally locking manner, and wherein the adjusting unit is configured to move the shielding element from the actual position thereof into the target position thereof while overcoming the frictional locking.
A method for setting a position of a shielding element in an apparatus for analyzing and/or processing a sample with a particle beam, wherein the shielding element is for shielding an electric field (E) generated by charges (Q) accumulated on the sample when the shielding element is at a distance from the sample of at most 100 μm, and wherein the method comprises the following steps:
- a) mounting the shielding element in a vacuum housing of the apparatus, wherein the shielding element is secured in a frictionally locking manner;
- b) producing the vacuum in the vacuum housing;
- c) detecting an actual position of the shielding element;
- and
- d) adjusting the shielding element from the actual position into a target position in the presence of vacuum while overcoming the frictional locking.
Dependencies are inferred from the claim text.