H01J 2237/31735
Direct-write microstructures
H01J2237/31735 (Direct-write microstructures) appears on 97 US grants and 64 published applications in this corpus.
Search patents in H01J- Granted patents
- 97
- Published applications
- 64
- Assignees
- 61
- Inventors
- 240
- Latest grant
- 27 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 3 | 0 |
| 1992 | 3 | 0 |
| 1993 | 2 | 0 |
| 1994 | 3 | 0 |
| 1995 | 5 | 0 |
| 1996 | 3 | 0 |
| 1997 | 3 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 6 | 0 |
| 2002 | 3 | 4 |
| 2003 | 2 | 4 |
| 2004 | 2 | 1 |
| 2005 | 5 | 5 |
| 2006 | 1 | 5 |
| 2007 | 4 | 8 |
| 2008 | 3 | 4 |
| 2009 | 8 | 3 |
| 2010 | 2 | 3 |
| 2011 | 5 | 1 |
| 2012 | 2 | 3 |
| 2013 | 2 | 0 |
| 2014 | 1 | 1 |
| 2015 | 0 | 2 |
| 2016 | 3 | 0 |
| 2017 | 5 | 2 |
| 2018 | 3 | 4 |
| 2019 | 3 | 0 |
| 2020 | 2 | 2 |
| 2021 | 2 | 2 |
| 2022 | 3 | 3 |
| 2023 | 1 | 3 |
| 2024 | 1 | 2 |
| 2025 | 2 | 1 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Method and apparatus for mask repair27 Jan 2026US 12,535,729 B2Carl Zeiss SMT GmbH
- Method and apparatus for forming a patterned layer of material26 Aug 2025US 12,399,428 B2ASML Netherlands B. V.
- Reduced spatial/temporal overlaps to increase temporal overlaps to increase precision in focused ion beam FIB instruments for milling and imaging and focused ion beams for lithography7 Jan 2025US 12,191,110 B2The University of Liverpool
- Method and device for spatial charged particle bunching20 Aug 2024US 12,068,130 B2NexGen Semi Holding, Inc.
- Method and device for spatial charged particle bunching11 Jul 2023US 11,699,568 B2NextGen Semi Holding, Inc.
- Method and apparatus for electron beam exposure28 May 2026US 2026/0148930 A1
- Scanning electron microscopic direct-write lithography system based on a compliant nano servo motion system16 Jan 2025US 2025/0021014 A1Tsinghua University
- Methods and apparatuses for processing a lithographic object19 Sep 2024US 2024/0310722 A1Carl Zeiss SMT GmbH
- Method and device for spatial charged particle bunching4 Apr 2024US 2024/0112882 A1NexGen Semi Holding, Inc.
- Method and apparatus for forming a patterned layer of material2 Nov 2023US 2023/0350301 A1ASML Netherlands B. V.
Most cited
By later US patents
- Machining oxide thin-films with an atomic force microscope: pattern and object formation on the nanometer scale169US 5,252,835 APresident and Trustees of Harvard College · 1993
- Method and apparatus for writing or etching narrow linewidth patterns on insulating materials87US 5,047,649 AInternational Business Machines Corporation · 1991
- Microtip-controlled nanostructure fabrication and multi-tipped field-emission tool for parallel-process nanostructure fabrication64US 5,126,574 AThe United States of America as represented by the Secretary of Commerce · 1992
- System for analyzing surfaces of samples47US 5,619,035 ABiotechnology Research and Development Corporation · 1997
- Surface atom fabrication method and apparatus44US 5,416,331 AHitachi, Ltd. · 1995