H01J 2237/31737
Using ions
Official title: using ions
H01J2237/31737 (Using ions) appears on 43 US grants and 37 published applications in this corpus.
Search patents in H01J- Granted patents
- 43
- Published applications
- 37
- Assignees
- 25
- Inventors
- 80
- Latest grant
- 20 Aug 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 0 |
| 2002 | 0 | 2 |
| 2003 | 2 | 2 |
| 2004 | 0 | 1 |
| 2005 | 3 | 2 |
| 2006 | 1 | 3 |
| 2007 | 4 | 8 |
| 2008 | 0 | 0 |
| 2009 | 6 | 1 |
| 2010 | 1 | 3 |
| 2011 | 1 | 0 |
| 2012 | 2 | 3 |
| 2013 | 1 | 0 |
| 2014 | 1 | 1 |
| 2015 | 0 | 0 |
| 2016 | 2 | 0 |
| 2017 | 5 | 0 |
| 2018 | 2 | 1 |
| 2019 | 0 | 0 |
| 2020 | 1 | 2 |
| 2021 | 2 | 2 |
| 2022 | 3 | 3 |
| 2023 | 1 | 0 |
| 2024 | 1 | 2 |
| 2025 | 0 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Method and device for spatial charged particle bunching20 Aug 2024US 12,068,130 B2NexGen Semi Holding, Inc.
- Method and device for spatial charged particle bunching11 Jul 2023US 11,699,568 B2NextGen Semi Holding, Inc.
- Imaging method and imaging system20 Dec 2022US 11,532,454 B2Hitachi High-Tech Corporation
- Low keV ion beam image restoration by machine learning for object localization7 Jun 2022US 11,355,305 B2FEI Company
- Method and device for spatial charged particle bunching17 May 2022US 11,335,537 B2NexGen Semi Holding, Inc.
- Scanning electron microscopic direct-write lithography system based on a compliant nano servo motion system16 Jan 2025US 2025/0021014 A1Tsinghua University
- Methods and apparatuses for processing a lithographic object19 Sep 2024US 2024/0310722 A1Carl Zeiss SMT GmbH
- Method and device for spatial charged particle bunching4 Apr 2024US 2024/0112882 A1NexGen Semi Holding, Inc.
- Scanning electron microscopic direct-write lithography system based on a compliant nano servo motion system15 Sep 2022US 2022/0291589 A1Tsinghua University
- Method and device for spatial charged particle bunching11 Aug 2022US 2022/0254603 A1NexGen Semi Holding, Inc.
Most cited
By later US patents
- Projection ion beam machining apparatus33US 6,583,426 B1Hitachi, Ltd. · 2003
- Apparatus and method for controlled particle beam manufacturing33US 7,259,373 B2NexGenSemi Holdings Corporation · 2007
- Apparatus and method for defining a pattern on a substrate30US 6,313,905 B1International Business Machines Corporation · 2001
- Charged particle beam system29US 6,979,822 B1FEI Company · 2005
- Apparatus and method for controlled particle beam manufacturing22US 7,659,526 B2NexGen Semi Holding, Inc. · 2010