Method and device for spatial charged particle bunching
AssigneeNextGen Semi Holding, Inc.
InventorsMark Joseph Bennahmias, Michael John Zani, Jeffrey Winfield Scott
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AssigneeNextGen Semi Holding, Inc.
InventorsMark Joseph Bennahmias, Michael John Zani, Jeffrey Winfield Scott
Estimating the term…
A charged particle buncher includes a series of spaced apart electrodes arranged to generate a shaped electric field. The series includes a first electrode, a last electrode and one or more intermediate electrodes. The charged particle buncher includes a waveform device attached to the electrodes and configured to apply a periodic potential waveform to each electrode independently in a manner so as to form a quasi-electrostatic time varying potential gradient between adjacent electrodes and to cause spatial distribution of charged particles that form a plurality of nodes and antinodes. The nodes have a charged particle density and the antinodes have substantially no charged particle density, and the nodes and the antinodes are formed from a charged particle beam configured to hit the target.
A charged particle bunching system comprising:
A charged particle collimator comprising:
Dependencies are inferred from the claim text.