H01J 2237/304
Controlling tubes
H01J2237/304 (Controlling tubes) appears on 1,393 US grants and 1,303 published applications in this corpus.
Search patents in H01J- Granted patents
- 1,393
- Published applications
- 1,303
- Assignees
- 298
- Inventors
- 2,197
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 2 | 0 |
| 1978 | 0 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 2 | 0 |
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 3 | 0 |
| 1986 | 5 | 0 |
| 1987 | 6 | 0 |
| 1988 | 2 | 0 |
| 1989 | 6 | 0 |
| 1990 | 4 | 0 |
| 1991 | 4 | 0 |
| 1992 | 18 | 0 |
| 1993 | 11 | 0 |
| 1994 | 16 | 0 |
| 1995 | 19 | 0 |
| 1996 | 12 | 0 |
| 1997 | 11 | 0 |
| 1998 | 19 | 0 |
| 1999 | 35 | 0 |
| 2000 | 16 | 0 |
| 2001 | 27 | 15 |
| 2002 | 31 | 24 |
| 2003 | 35 | 31 |
| 2004 | 31 | 44 |
| 2005 | 41 | 56 |
| 2006 | 45 | 68 |
| 2007 | 30 | 69 |
| 2008 | 61 | 88 |
| 2009 | 75 | 69 |
| 2010 | 60 | 37 |
| 2011 | 42 | 34 |
| 2012 | 40 | 48 |
| 2013 | 39 | 48 |
| 2014 | 54 | 43 |
| 2015 | 66 | 94 |
| 2016 | 69 | 65 |
| 2017 | 70 | 64 |
| 2018 | 52 | 52 |
| 2019 | 69 | 63 |
| 2020 | 55 | 58 |
| 2021 | 49 | 34 |
| 2022 | 41 | 47 |
| 2023 | 37 | 41 |
| 2024 | 24 | 42 |
| 2025 | 36 | 40 |
| 2026 | 19 | 29 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- End point determination by means of contrast gas29 Sep 2026US 12,748,347 B2Carl Zeiss SMT GmbH
- Method for operating a multi-beam particle microscope with fast closed-loop beam current control, computer program product and multi-beam particle microscope25 Aug 2026US 12,719,015 B2Carl Zeiss MultiSEM GmbH
- Method for doping two-dimensional material based on cluster ion implantation25 Aug 2026US 12,719,017 B2Jiangsu Jichuang Atomic Cluster Technology Research Institute Co., Ltd.
- Method and apparatus for continuous chained energy ion implantation4 Aug 2026US 12,700,562 B2Axcelis Technologies, Inc.
- Method for particle beam-induced processing of a defect of a microlithographic photomask7 Jul 2026US 12,676,283 B2Carl Zeiss SMT GmbH
- Ion implanter and ion implantation method24 Sep 2026US 2026/0290748 A1Sumitomo Heavy Industries Material Solutions Co., Ltd.
- Charged particle beam device and deposition method17 Sep 2026US 2026/0279725 A1Kioxia Corporation
- Charged Particle Beam Apparatus and Sample Processing Method27 Aug 2026US 2026/0255914 A1Hitachi High-Tech Corporation
- Charged particle beam writing apparatus, drift amount calculation method, and charged particle beam writing method20 Aug 2026US 2026/0245830 A1NuFlare Technology, Inc.
- Line edge smoothing with jittered twist13 Aug 2026US 2026/0237589 A1Axcelis Technologies, Inc.
Most cited
By later US patents
- Particle-optical projection system1,466US 7,388,217 B2IMS Nanofabrication GmbH · 2008
- Electron beam inspection system and method257US 5,502,306 AKLA Instruments Corporation · 1996
- Multijunction photovoltaic cells and panels using a silicon or silicon-germanium active substrate cell for space and terrestrial applications199US 6,340,788 B12002
- Closed-loop process control for electron beam freeform fabrication and deposition processes135US 8,452,073 B2The United States of America as represented by the Administrator of the National Aeronautics and Space Administration · 2013
- Method of probing a net of an IC at an optimal probe-point121US 5,530,372 ASchlumberger Technologies, Inc. · 1996