H01J 2237/24528
Direction of beam or parts thereof in view of the optical axis
Official title: Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece
H01J2237/24528 (Direction of beam or parts thereof in view of the optical axis) appears on 120 US grants and 146 published applications in this corpus.
Search patents in H01J- Granted patents
- 120
- Published applications
- 146
- Assignees
- 50
- Inventors
- 272
- Latest grant
- 21 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 1 | 0 |
| 2003 | 2 | 2 |
| 2004 | 4 | 5 |
| 2005 | 4 | 3 |
| 2006 | 3 | 7 |
| 2007 | 3 | 8 |
| 2008 | 13 | 11 |
| 2009 | 3 | 10 |
| 2010 | 12 | 9 |
| 2011 | 4 | 5 |
| 2012 | 10 | 8 |
| 2013 | 8 | 8 |
| 2014 | 9 | 5 |
| 2015 | 5 | 6 |
| 2016 | 3 | 5 |
| 2017 | 6 | 3 |
| 2018 | 1 | 2 |
| 2019 | 4 | 8 |
| 2020 | 9 | 9 |
| 2021 | 5 | 4 |
| 2022 | 5 | 3 |
| 2023 | 2 | 4 |
| 2024 | 1 | 6 |
| 2025 | 1 | 6 |
| 2026 | 2 | 9 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- In-situ ion beam angle measurement21 Apr 2026US 12,609,279 B2APPLIED Materials.Inc.
- Electron microscope and specimen orientation alignment method24 Mar 2026US 12,586,752 B2JEOL Ltd.
- Method and system for automatic zone axis alignment15 Jul 2025US 12,362,135 B2FEI Company
- Detection and correction of system responses in real-time6 Feb 2024US 11,894,214 B2KLA Corporation
- Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system17 Oct 2023US 11,791,128 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Ion implanter and ion implantation method24 Sep 2026US 2026/0290748 A1Sumitomo Heavy Industries Material Solutions Co., Ltd.
- System and method for adjusting an ion beam10 Sep 2026US 2026/0269182 A1APPLIED Materials.Inc.
- Line edge smoothing with jittered twist13 Aug 2026US 2026/0237589 A1Axcelis Technologies, Inc.
- Rapid mode switching of charged-particle-beam devices13 Aug 2026US 2026/0237595 A1
- A new design concept of scanning electron microscope with charged particle source30 Jul 2026US 2026/0221383 A1ASML Netherlands B. V.
Most cited
By later US patents
- Apparatus and methods for electron beam detection111US 8,692,204 B2KLA-Tencor Corporation · 2014
- Technique and apparatus for monitoring ion mass, energy, and angle in processing systems26US 8,698,107 B2Varian Semiconductor Equipment Associates, Inc. · 2014
- Ion beam measurement systems and methods for ion implant dose and uniformity control25US 6,992,309 B1Axcelis Technologies, Inc. · 2006
- Apparatus and method for three dimensional ion processing21US 8,288,741 B1Varian Semiconductor Equipment Associates, Inc. · 2012
- Beam uniformity and angular distribution measurement system20US 6,677,598 B1Axcelis Technologies, Inc. · 2004