Rapid mode switching of charged-particle-beam devices

A charged particle beam (CPB) microscope system comprising:

• a charged particle beam source;
• a CPB column for configured to transmit a charged particle beam from the charged particle beam source onto a sample;
• an optics assembly comprising transfer optics that are configured to transfer charged particles that are either transmitted through the sample or scattered by the sample to a detector;
• and
• a switchable multipole element member of either the CPB column or the optics assembly, wherein the switchable multipole element is configured to create, when activated, a quadrupole field and is configured such that:
• activating the switchable multipole element either causes or enables the CPB microscope to generate a first set of one or more images or data sets, the first set of one or more images or data sets comprising information relating to the sample in accordance with a first imaging or data acquisition mode;
• and
• de-activating the switchable multipole element either causes or enables the CPB microscope to generate a second set of one or more images or data sets, the second set of one or more images or data sets comprising information relating to the sample in accordance with a second imaging or data acquisition mode.

A Transmission Electron Microscope (TEM) system comprising:

• an image projection system comprising:
• an objective lens system configured to receive electron rays from a sample and having a back focal plane;
• a projection lens system disposed between the objective lens system and a detector;
• and
• a first switchable multipole element that is configured to create, when activated, a quadrupole field and that is positioned at a selected aperture plane of the objective lens system and that is configured to be alternately activated and deactivated,
• wherein activation of the first switchable multipole element causes an image of the sample to be projected onto the detector and deactivation of the switchable multipole element causes a diffraction pattern of the sample to be projected onto the detector.

An improved substage optical system for a Transmission Electron Microscope (TEM) or a Scanning Transmission Electron Microscope (STEM) that comprises:

• an objective lens system;
• a first transfer lens system positioned at a back focal plane of the objective lens system;
• a second transfer lens system that is disposed at an intermediate diffraction plane that is established by the objective lens system and the first transfer lens system;
• a laser phase plate disposed proximal to the intermediate diffraction plane;
• and a laser that directs a laser beam onto the laser phase plate;
• the improvement comprising:
• a switchable multipole element that is configured to create, when activated, a quadrupole field and that is disposed proximal to the objective lens image plane and that is configured to be repeatedly activated and deactivated.

A charged particle beam (CPB) microscope comprising:

• a charged particle beam source;
• a CPB column configured to transmit a charged particle beam from the charged particle beam source to a sample;
• a CPB projection assembly comprising transfer optics that transfer either charged particles that are either transmitted through the sample or emitted by or scattered by the sample to a detector;
• and
• an switchable multipole element that is switchable between an activated state and a de-activated state and that is configured, when activated, to create a quadrupole field and that is disposed within either the CPB column or the CPB projection assembly, whereby:
• activating the switchable multipole element either causes or enables the CPB microscope to generate one or more images in accordance with a first imaging mode;
• and
• de-activating the switchable multipole element either causes or enables the CPB microscope to generate one or more images in accordance with a second imaging mode.