H01J 2237/16
Vessels
H01J2237/16 (Vessels) appears on 242 US grants and 258 published applications in this corpus.
Search patents in H01J- Granted patents
- 242
- Published applications
- 258
- Assignees
- 125
- Inventors
- 623
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 3 | 0 |
| 1994 | 0 | 0 |
| 1995 | 2 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 3 | 0 |
| 1999 | 2 | 0 |
| 2000 | 7 | 0 |
| 2001 | 5 | 1 |
| 2002 | 3 | 3 |
| 2003 | 2 | 4 |
| 2004 | 5 | 4 |
| 2005 | 2 | 5 |
| 2006 | 5 | 11 |
| 2007 | 8 | 9 |
| 2008 | 11 | 11 |
| 2009 | 9 | 11 |
| 2010 | 5 | 16 |
| 2011 | 14 | 10 |
| 2012 | 12 | 11 |
| 2013 | 14 | 15 |
| 2014 | 10 | 12 |
| 2015 | 14 | 31 |
| 2016 | 16 | 17 |
| 2017 | 15 | 12 |
| 2018 | 17 | 9 |
| 2019 | 8 | 4 |
| 2020 | 5 | 12 |
| 2021 | 3 | 8 |
| 2022 | 9 | 9 |
| 2023 | 5 | 13 |
| 2024 | 5 | 8 |
| 2025 | 10 | 7 |
| 2026 | 7 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Electrostatic chuck having extended lifetime29 Sep 2026US 12,751,248 B2APPLIED Materials.Inc.
- Charged particle beam devices and membrane assemblies useful therein7 Jul 2026US 12,676,280 B2Airsem Technologies Ltd.
- Focused ion beam system26 May 2026US 12,640,335 B2V Technology Co., Ltd.
- Concentrated solar irradiation of targets in plasmas10 Mar 2026US 12,573,587 B2National Technology & Engineering Solutions of Sandia, LLC
- Corrosion-resistant components3 Mar 2026US 12,567,564 B2CoorsTek, Inc.
- Charged particle beam devices and membrane assemblies useful therein8 Oct 2026US 2026/0311957 A1Airsem Technologies Ltd.
- System, methods, and apparatuses with reduced noise current30 Jul 2026US 2026/0221373 A1ASML Netherlands B. V.
- Structural member11 Jun 2026US 2026/0162926 A1Toto Ltd.
- Vacuum simulation for charged-particle microscopy grid receptacles26 Feb 2026US 2026/0058089 A1FEI Company
- Printed circuit board for sealing vacuum system12 Feb 2026US 2026/0045443 A1
Most cited
By later US patents
- Gasket with positioning feature for clamped monolithic showerhead electrode166US 8,272,346 B2Lam Research Corporation · 2012
- Electron beam device with single crystal window and expansion-matched anode95US 5,612,588 AAmerican International Technologies, Inc. · 1997
- Electron beam array for surface treatment85US 5,414,267 AAmerican International Technologies, Inc. · 1995
- Charged particle beam lithography machine incorporating localized vacuum envelope75US 4,607,167 AVarian Associates, Inc. · 1986
- Low-temperature, converging, reactive gas source and method of use68US 8,328,982 B1Surfx Technologies LLC · 2012