H01J 2237/166
Sealing means
H01J2237/166 (Sealing means) appears on 89 US grants and 104 published applications in this corpus.
Search patents in H01J- Granted patents
- 89
- Published applications
- 104
- Assignees
- 57
- Inventors
- 267
- Latest grant
- 7 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1998 | 2 | 0 |
| 1999 | 1 | 0 |
| 2000 | 4 | 0 |
| 2001 | 4 | 1 |
| 2002 | 1 | 3 |
| 2003 | 2 | 1 |
| 2004 | 3 | 2 |
| 2005 | 0 | 2 |
| 2006 | 0 | 5 |
| 2007 | 3 | 3 |
| 2008 | 6 | 4 |
| 2009 | 2 | 4 |
| 2010 | 1 | 9 |
| 2011 | 9 | 3 |
| 2012 | 3 | 7 |
| 2013 | 8 | 3 |
| 2014 | 4 | 5 |
| 2015 | 5 | 7 |
| 2016 | 1 | 3 |
| 2017 | 2 | 3 |
| 2018 | 4 | 4 |
| 2019 | 3 | 0 |
| 2020 | 1 | 7 |
| 2021 | 1 | 4 |
| 2022 | 7 | 7 |
| 2023 | 3 | 4 |
| 2024 | 2 | 4 |
| 2025 | 4 | 6 |
| 2026 | 3 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Charged particle beam devices and membrane assemblies useful therein7 Jul 2026US 12,676,280 B2Airsem Technologies Ltd.
- Focused ion beam system26 May 2026US 12,640,335 B2V Technology Co., Ltd.
- Corrosion-resistant components3 Mar 2026US 12,567,564 B2CoorsTek, Inc.
- Printed circuit board for sealing vacuum system11 Nov 2025US 12,469,669 B2ASML Netherlands B. V.
- Integrated feedthrough for high voltage cables29 Jul 2025US 12,374,523 B1Hefei Comprehensive National Science Center Energy Research Institute (Anhui Energy Laboratory)
- Charged particle beam devices and membrane assemblies useful therein8 Oct 2026US 2026/0311957 A1Airsem Technologies Ltd.
- Vacuum simulation for charged-particle microscopy grid receptacles26 Feb 2026US 2026/0058089 A1FEI Company
- Printed circuit board for sealing vacuum system12 Feb 2026US 2026/0045443 A1
- Wall member and plasma processing apparatus27 Nov 2025US 2025/0364232 A1Tokyo Electron Limited
- Charged particle processing system25 Sep 2025US 2025/0299910 A1Multibeam Corporation
Most cited
By later US patents
- Gasket with positioning feature for clamped monolithic showerhead electrode166US 8,272,346 B2Lam Research Corporation · 2012
- Chamber interfacing O-rings and method for implementing same46US 5,746,434 ALam Research Corporation · 1998
- Vacuum bearing structure and a method of supporting a movable member37US 6,515,288 B1APPLIED Materials.Inc. · 2003
- Alternating current rotatable sputter cathode28US 7,399,385 B2Tru Vue, Inc. · 2008
- Alternating current rotatable sputter cathode28US 7,905,995 B2APPLIED Materials.Inc. · 2011