Chamber interfacing O-rings and method for implementing same
AssigneeLam Research Corporation
InventorsTrace L. Boyd, Richard D. Beer, Eric A. Terbeek, Vernon W. H. Wong
Life of this patent
Estimating the term…
Abstract
Disclosed is a method for implementing a vacuum seal between an interface of a transport chamber interface port of a transport chamber and another chamber. The transport chamber being configured to mate with the another chamber in an adjacent relationship. The method includes placing an insert plate having a sealing surface containing a first O-ring into the transport chamber interface port such that the first O-ring is sandwiched between the sealing surface and a surface of the another chamber. Therefore, a vacuum seal is achieved between the transport chamber and the another chamber within the transport chamber interface port via the first O-ring.
Claims25
A method for implementing a vacuum seal between an interface of a transport chamber interface port of a transport chamber and another chamber, said transport chamber being configured to mate with the another chamber in an adjacent relationship, comprising:
- placing an insert plate having a sealing surface containing a first O-ring into the transport chamber interface port such that the first O-ring is sandwiched between the sealing surface and a surface of the another chamber, the insert plate having a stepped lip substantially contained within a stepped groove defined in the transport chamber interface port, and the vacuum seal is achieved between the transport chamber and the another chamber within the transport chamber interface port via the first O-ring.
An apparatus having interfacing O-rings between an interface of a first chamber interface port and a second chamber interface port of a second chamber, the apparatus comprising:
- an insert plate having a sealing surface containing a first O-ring and a meeting surface containing a second O-ring, the insert plate having a stepped lip substantially contained within a stepped groove of the first chamber interface port such that the first O-ring is sandwiched between the sealing surface and a surface of a second chamber.
A method for implementing a vacuum seal between a transport chamber and another chamber, the transport chamber having an interface port with a stepped groove at a first surface of the transport chamber, the another chamber having a first port disposed at second surface of the another chamber, comprising:
- providing a first O-ring;
- providing a insert plate having a stepped lip, a through hole and a sealing surface, the sealing surface being configured to mate with the first O-ring;
- placing the insert plate into the interface port such that the through hole and the second port define a first passageway, the first O-ring being mated with the sealing surface and disposed between the sealing surface and the second surface of the another chamber, and the insert plate being substantially contained within the stepped groove of the interface port;
- fastening the insert plate onto the transport chamber, thereby causing the O-ring to be compressed between the sealing surface and the second surface of the another chamber, thereby creating the vacuum seal between the transport chamber and the another chamber.
An insert plate having a stepped lip and a through hole for implementing a vacuum seal between a transport chamber and another chamber, the transport chamber having an interface port with a stepped groove at a first surface of the transport chamber, the another chamber having a first port disposed at second surface of the another chamber, comprising:
- a sealing surface configured to mate with a first O-ring, the insert plate being substantially contained within the stepped groove of the interface port to define a second passageway via the through hole and the second port, the first O-ring being mated with the sealing surface and disposed between the sealing surface and the second surface of the another chamber when the inserted plate is fitted within the interface port.
A method for implementing a vacuum seal between an interface of a transport chamber interface port of a transport chamber and another chamber, said transport chamber being configured to mate with the another chamber in an adjacent relationship, comprising:
- placing an insert plate having a sealing surface containing a first O-ring into the transport chamber interface port such that the first O-ring is sandwiched between the sealing surface and a surface of the another chamber, and the insert plate including a meeting surface, the meeting surface containing a second O-ring and providing a receiving surface for a gate plate located within the transport chamber, and the vacuum seal being achieved between the transport chamber and the another chamber within the transport chamber interface port via the first O-ring;
- determining whether one of the first O-ring and the second O-ring requires replacement;
- and
- removing the insert plate, the first O-ring, and the second O-ring as one unit through a view port of the transport chamber to facilitate the replacement.
Dependencies are inferred from the claim text.