Vacuum simulation for charged-particle microscopy grid receptacles
AssigneeFEI Company
InventorsDavid Levi, Simon-Pierre Smith, Jae Hong Kim, Ali Haghshenas
Life of this patent
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Abstract
Systems/techniques are provided for facilitating vacuum simulation for charged-particle microscopy grid receptacles. In various embodiments, an apparatus can comprise a positioning mechanism configured to be coupled to a vacuum chamber of a charged-particle microscope. In various aspects, the apparatus can comprise an adjustable force applicator coupled to the positioning mechanism and configured to simulate a vacuum for a microscopy grid receptacle located on an inner surface of a load-lock door of the vacuum chamber by mechanically pressing against an outer surface of the load-lock door.
Claims20
An apparatus, comprising:
- a positioning mechanism configured to be coupled to a vacuum chamber of a charged-particle microscope;
- and
- an adjustable force applicator coupled to the positioning mechanism and configured to simulate a vacuum for a microscopy grid receptacle located on an inner surface of a load-lock door of the vacuum chamber by mechanically pressing against an outer surface of the load-lock door.
A method, comprising:
- coupling a positioning mechanism to a charged-particle microscope, wherein the charged-particle microscope has a vacuum chamber with a load-lock door and a microscopy grid receptacle coupled to an inner surface of the load-lock door;
- and
- simulating a vacuum for the microscopy grid receptacle by mechanically pressing against an outer surface of the load-lock door via an adjustable force applicator that is coupled to the positioning mechanism.
A method, comprising:
- causing a vacuum chamber of a charged-particle microscope to enter a vacuumed state;
- measuring, via a feedback sensor coupled to a load-lock door of the vacuum chamber, a vacuum-induced deflection or pressure experienced by the load-lock door due to the vacuumed state;
- causing the vacuum chamber to exit the vacuumed state;
- and
- simulating the vacuumed state, by causing an adjustable force applicator to mechanically press against the load-lock door such that the load-lock door experiences the vacuum-induced deflection or pressure while the vacuum chamber is not in the vacuumed state.
Dependencies are inferred from the claim text.