Corrosion-resistant components
AssigneeCoorsTek, Inc.
InventorsMatthew Simpson, Ramesh Divakar, Alan Filer
Life of this patent
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Abstract
A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a white corrosion-resistant non-porous outer layer associated with the ceramic insulating substrate, the white corrosion-resistant non-porous outer layer having a thickness of at least 50 μm, a porosity of at most 1%, and a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, c) an L* value of at least 90 as measured on a planar surface of the white corrosion-resistant non-porous outer layer. Methods of making are also disclosed.
Claims22
A component comprising:
- (a) a ceramic insulating substrate;
- wherein the ceramic insulating substrate is selected from the group consisting of aluminum oxides, aluminum nitrides, silicon nitrides, and mixtures thereof;
- and
- (b) an outer layer adhered to the ceramic insulating substrate, the outer layer comprising:
- a porosity of at most 1%;
- an average grain size of at least 100 nm and at most 100 μm;
- a composition comprising at least 15% by weight of a rare earth compound based on total weight of the outer layer;
- wherein the rare earth compound is selected from the group consisting of yttrium oxide, yttrium silicates, yttrium fluorides, yttrium oxyfluorides, yttrium aluminates, yttrium nitrides, and mixtures thereof;
- a thickness from about 50 μm to about 500 μm;
- and
- a microstructure having less than 50 microcracks and fissures per mm2;
- wherein the component realizes a loss tangent of less than 1×10−4.
A component comprising:
- (a) an aluminum oxide substrate;
- and
- (b) an outer yttrium oxide layer proximal the aluminum oxide substrate, the outer layer comprising:
- (i) a porosity of at most 1%;
- (ii) an average grain size of at least 100 nm and at most 100 μm;
- (iii) a composition comprising at least 15% by weight of the yttrium oxide based on total weight of the outer layer;
- (iv) a thickness from about 50 μm to about 500 μm;
- and
- (v) a microstructure having less than 50 microcracks and fissures per mm2;
- wherein the component realizes a loss tangent of less than 1×10−4.
Dependencies are inferred from the claim text.