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US 2026/0162926 A1Published application
Structural member
AssigneeToto Ltd.
InventorsShun KATAOKA, Senri SAKAMOTO, Ryoto TAKIZAWA
Life of this patent
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Abstract
A structural member having sufficient durability against plasma is provided. The structural member 10 includes a base material 100 and a protective film 200 covering the surface 110 of the base material 100. The protective film 200 includes ytterbium oxide as a main component and has an indentation hardness of greater than 8.6 GPa.
Claims8
A structural member comprising:
- a base material;
- and
- a protective film covering a surface of the base material,
- wherein the protective film comprises ytterbium oxide as a main component and has an indentation hardness of greater than 8.6 GPa.
1 more element
Dependencies are inferred from the claim text.