H01J 2237/1507
Dynamically
Official title: dynamically, e.g. to obtain same impinging angle on whole area
H01J2237/1507 (Dynamically) appears on 18 US grants and 18 published applications in this corpus.
Search patents in H01J- Granted patents
- 18
- Published applications
- 18
- Assignees
- 21
- Inventors
- 60
- Latest grant
- 6 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 1 | 2 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 1 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 1 |
| 2014 | 0 | 0 |
| 2015 | 0 | 1 |
| 2016 | 2 | 0 |
| 2017 | 0 | 1 |
| 2018 | 0 | 1 |
| 2019 | 2 | 2 |
| 2020 | 1 | 2 |
| 2021 | 0 | 4 |
| 2022 | 3 | 1 |
| 2023 | 2 | 2 |
| 2024 | 2 | 1 |
| 2025 | 0 | 0 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Electron microscope and image acquisition method6 Jan 2026US 12,518,944 B2JEOL Ltd.
- Transmission electron microscope and inspection method using transmission electron microscope17 Dec 2024US 12,170,184 B2Hitachi High-Tech Corporation
- Modulation of rolling k vectors of angled gratings1 Oct 2024US 12,106,935 B2APPLIED Materials.Inc.
- Modulation of rolling k vectors of angled gratings6 Jun 2023US 11,670,482 B2APPLIED Materials.Inc.
- Electron microscope and sample observation method using the same10 Jan 2023US 11,551,907 B2Riken
- Charged-particle beam apparatus with beam-tilt and methods thereof18 Jan 2024US 2024/0021404 A1ASML Netherlands B. V.
- Modulation of rolling k vectors of angled gratings17 Aug 2023US 2023/0260746 A1APPLIED Materials.Inc.
- Electron Microscope and Image Acquisition Method27 Apr 2023US 2023/0127255 A1JEOL Ltd.
- Transmission Electron Microscope and Inspection Method Using Transmission Electron Microscope4 Aug 2022US 2022/0244201 A1Hitachi High-Tech Corporation
- In Situ Angle Measurement Using Channeling30 Sep 2021US 2021/0305011 A1APPLIED Materials.Inc.
Most cited
By later US patents
- Device manufacture involving lithographic processing36US 5,258,246 AAT&T Bell Laboratories · 1993
- Dynamic compensation of non-linear electron beam landing angle in variable axis lenses11US 5,285,074 AInternational Business Machines Corporation · 1994
- Scanning systems and methods for providing ions from an ion beam to a workpiece8US 6,992,310 B1Axcelis Technologies, Inc. · 2006
- Technique for ion beam angle spread control8US 7,868,305 B2Varian Semiconductor Equipment Associates, Inc. · 2011
- Adjustment of particle beam landing angle7US 6,028,662 AInternational Business Machines Corporation · 2000