Modulation of rolling k vectors of angled gratings
AssigneeApplied Materials, Inc.
InventorsJoseph C. Olson, Morgan Evans, Rutger Meyer Timmerman Thijssen
Life of this patent
Estimating the term…
Abstract
Embodiments described herein relate to methods and apparatus for forming gratings having a plurality of fins with different slant angles on a substrate and forming fins with different slant angles on successive substrates using angled etch systems and/or an optical device. The methods include positioning portions of substrates retained on a platen in a path of an ion beam. The substrates have a grating material disposed thereon. The ion beam is configured to contact the grating material at an ion beam angle ϑ relative to a surface normal of the substrates and form gratings in the grating material.
Claims4
A device comprising:
- A substrate having a discrete input coupling region, a discrete intermediate coupling region, and a discrete output coupling region, each of the regions having a plurality of optical device fins disposed on the substrate, the plurality of optical device fins of each region comprising:
- at least one first optical device fin having a first slant angle;
- at least one second optical device fin having a second slant angle different than the first slant angle;
- and at least one third optical device fin having a third slant angle different than the first slant angle and the second slant angle, wherein:
- the second slant angle is greater than the first slant angle and the third slant angle is greater than the second slant angle;
- or
- the first slant angle is greater than the second slant angle and the second slant angle is greater than the third slant angle.
Dependencies are inferred from the claim text.