H01J 2237/1506
Tilting or rocking beam around an axis substantially at an angle to
Official title: Tilting or rocking beam around an axis substantially at an angle to optical axis
H01J2237/1506 (Tilting or rocking beam around an axis substantially at an angle to) appears on 55 US grants and 57 published applications in this corpus.
Search patents in H01J- Granted patents
- 55
- Published applications
- 57
- Assignees
- 39
- Inventors
- 154
- Latest grant
- 24 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 1 |
| 2002 | 1 | 0 |
| 2003 | 4 | 1 |
| 2004 | 0 | 1 |
| 2005 | 1 | 1 |
| 2006 | 1 | 2 |
| 2007 | 1 | 0 |
| 2008 | 1 | 3 |
| 2009 | 0 | 1 |
| 2010 | 2 | 0 |
| 2011 | 3 | 2 |
| 2012 | 0 | 1 |
| 2013 | 0 | 2 |
| 2014 | 3 | 1 |
| 2015 | 1 | 3 |
| 2016 | 4 | 1 |
| 2017 | 0 | 4 |
| 2018 | 4 | 1 |
| 2019 | 2 | 4 |
| 2020 | 5 | 6 |
| 2021 | 0 | 5 |
| 2022 | 5 | 4 |
| 2023 | 3 | 6 |
| 2024 | 5 | 4 |
| 2025 | 1 | 1 |
| 2026 | 3 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Method of determining an energy spectrum or energy width of a charged particle beam, and charged particle beam imaging device24 Feb 2026US 12,562,338 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Grid structures of ion beam etching (IBE) systems3 Feb 2026US 12,542,254 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Electron microscope and image acquisition method6 Jan 2026US 12,518,944 B2JEOL Ltd.
- Electron beam apparatus1 Jul 2025US 12,347,640 B2Hitachi High-Tech Corporation
- Transmission electron microscope and inspection method using transmission electron microscope17 Dec 2024US 12,170,184 B2Hitachi High-Tech Corporation
- Collation system28 May 2026US 2026/0148929 A1NEC Corporation
- Grid structures of ion beam etching (ibe) systems21 May 2026US 2026/0142123 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Method for operating a particle beam apparatus, computer program product and particle beam apparatus for carrying out the method15 May 2025US 2025/0157782 A1Carl Zeiss Microscopy GmbH
- Method of determining an energy spectrum or energy width of a charged particle beam, and charged particle beam imaging device7 Nov 2024US 2024/0371600 A1ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- TEM Orientation Mapping via Dark-Field Vector Images15 Aug 2024US 2024/0272097 A1
Most cited
By later US patents
- Inspection method and apparatus using electron beam92US 6,265,719 B1Kabushiki Kaisha Toshiba · 2001
- Charged particle beam system and pattern slant observing method48US 6,534,766 B2Kabushiki Kaisha Toshiba · 2003
- Charged particle beam column47US 6,614,026 B1APPLIED Materials.Inc. · 2003
- Particle-beam exposure apparatus with overall-modulation of a patterned beam43US 7,781,748 B2IMS Nanofabrication GmbH · 2010
- Device manufacture involving lithographic processing36US 5,258,246 AAT&T Bell Laboratories · 1993