Transmission electron microscope and inspection method using transmission electron microscope

An inspection method using a transmission electron microscope including:

• an irradiation unit configured to irradiate a sample with an electron beam;
• an objective lens configured to form an image of the electron beam transmitted through the sample;
• a beam deflector that is located above a position at which the sample is to be positioned and that is configured to deflect the electron beam;
• an objective aperture configured to pass only a part of the electron beam transmitted through the sample;
• a detection unit configured to detect the electron beam transmitted through the sample;
• and a control unit, wherein the control unit controls a deflection angle of the electron beam by the beam deflector such that the sample is irradiated while the electron beam precesses at a predetermined angle with respect to an optical axis, and that only a diffracted wave and/or a scattered wave at a desired angle among diffracted waves and/or scattered waves generated by the electron beam passing through the sample passes through the objective aperture, the control unit is capable of generating a dark field transmission electron microscopy image based on a detection signal in the detection unit of the diffracted wave and/or the scattered wave diffracted and/or scattered at a predetermined angle, and the control unit displays, in a superimposed manner on a display unit electrically coupled to the detection unit, a diffraction pattern of the sample and an annular display that indicates a region used for generation of the dark field transmission electron microscopy image, that has a width corresponding to a diameter of the objective aperture, and that has a radius corresponding to an angle of precession of the electron beam;
• the transmission electron microscope being capable of providing the display unit inside or outside the transmission electron microscope, the inspection method comprising:
• (a) a step of displaying, on the display unit, a diffraction pattern of the sample including a plurality of diffraction spots;
• (b) a step of selecting a first diffraction spot from the diffraction pattern;
• (c) a step of displaying, on the display unit, an annular display that has a width corresponding to a diameter of the objective aperture and that has a diameter corresponding to twice a distance between the optical axis and the first diffraction spot;
• (d) a step of determining an angle of precession of the electron beam by controlling the beam deflector based on a radius of the annular display;
• (e) a step of irradiating the sample with the electron beam after the step (d);
• (f) a step of inserting the objective aperture into a center of the optical axis after the step (e);
• and
• (g) a step of generating the dark field transmission electron microscopy image in the control unit based on a detection signal of the diffracted wave obtained by the detection unit and displaying the generated dark field transmission electron microscopy image on the display unit after the step (f).

A transmission electron microscope comprising:

• an electron source;
• an irradiation unit configured to irradiate a sample with an electron beam along a hollow cone;
• a detection unit to which a diffracted wave and/or a scattered wave from the sample is irradiated;
• and
• a graphical user interface including at least a first region in which a dark field transmission electron microscopy image is output by the detection unit and a second region in which an image corresponding to a pattern of the diffracted wave and/or the scattered wave is displayed, wherein
• the detection unit detects the diffracted wave and/or the scattered wave corresponding to a region inside an annular display that is displayed in the second region and centered on an optical axis, and outputs the dark field transmission electron microscopy image to the first region, and
• the first region and the second region are interlocked with each other such that changing a condition in the second region automatically changes the condition in the first region.