Transmission Electron Microscope and Inspection Method Using Transmission Electron Microscope

A transmission electron microscope comprising:

• an irradiation unit configured to irradiate a sample with an electron beam;
• an objective lens configured to form an image of the electron beam transmitted through the sample;
• a beam deflector that is located above a position at which the sample is to be positioned and that is configured to deflect the electron beam;
• an objective aperture configured to pass only a part of the electron beam transmitted through the sample;
• a detection unit configured to detect the electron beam transmitted through the sample;
• and
• a control unit, wherein
• the control unit controls a deflection angle of the electron beam by the beam deflector such that the sample is irradiated while the electron beam precesses at a predetermined angle with respect to an optical axis, and that only a diffracted wave and/or a scattered wave at a desired angle among diffracted waves and/or scattered waves generated by the electron beam passing through the sample passes through the objective aperture,
• the control unit is capable of generating a dark field transmission electron microscopy image based on a detection signal in the detection unit of the diffracted wave and/or the scattered wave diffracted and/or scattered at a predetermined angle, and
• the control unit displays, in a superimposed manner on a display unit electrically coupled to the detection unit, a diffraction pattern of the sample and an annular display that indicates a region used for generation of the dark field transmission electron microscopy image, that has a width corresponding to a diameter of the objective aperture, and that has a radius corresponding to an angle of precession of the electron beam.