Electron Microscope and Image Acquisition Method

An electron microscope comprising:

• an electron source for emitting an electron beam;
• an illumination lens for focusing the emitted electron beam;
• an aberration corrector for correcting aberrations;
• an illumination deflector assembly disposed ahead of the aberration corrector and operating to deflect the electron beam and to vary a tilt of the electron beam relative to a sample;
• a scanning deflector for scanning the sample with the electron beam;
• an objective lens;
• a detector for detecting electrons transmitted through the sample and producing an image signal;
• a control section for controlling the illumination deflector assembly;
• and
• an image generating section for receiving the image signal and generating a differential phase contrast (DPC) image,
• wherein the tilt of the electron beam is varied by the illumination deflector assembly such that the image generating section generates a plurality of DPC images at a plurality of different tilt angles of the electron beam and creates a final image based on the plurality of DPC images.