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AssigneeASML Netherlands B.V.
InventorsWeiming REN, Xuedong LIU, Shahedul HOQUE, Xiaoyu JI, Hermanus Adrianus DILLEN
Estimating the term…
Systems and methods of imaging a sample using a tilted charged-particle beam. The apparatus may comprise a first deflector located between the charged-particle source and an objective lens and configured to deflect the charged-particle beam away from the primary optical axis; a second deflector located substantially at a focal plane of the objective lens and configured to deflect the charged-particle beam back towards the primary optical axis; and a third deflector located substantially at a principal plane of the objective lens, wherein the third deflector is configured to shift a wobbling center of the objective lens to an off-axis wobbling location, and wherein the first and the second deflectors are configured to deflect the charged-particle beam to pass through the off-axis wobbling location to land on a surface of a sample at a first landing location and having a beam-tilt angle.
A charged-particle beam apparatus, comprising:
A method for imaging a sample using a tilted charged-particle beam, the method comprising:
A non-transitory computer readable medium storing a set of instructions that is executable by one or more processors of a charged-particle beam apparatus to cause the charged-particle beam apparatus to perform a method of imaging a sample using a tilted charged-particle beam, the method comprising:
A charged-particle beam apparatus, comprising:
Dependencies are inferred from the claim text.