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US 12,106,935 B2Granted
Modulation of rolling k vectors of angled gratings
AssigneeApplied Materials, Inc.
InventorsJoseph C. Olson, Morgan Evans, Rutger Meyer Timmerman Thijssen
Life of this patent
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Abstract
Embodiments described herein relate to methods and apparatus for forming gratings having a plurality of fins with different slant angles on a substrate and forming fins with different slant angles on successive substrates using angled etch systems and/or an optical device. The methods include positioning portions of substrates retained on a platen in a path of an ion beam. The substrates have a grating material disposed thereon. The ion beam is configured to contact the grating material at an ion beam angle ϑ relative to a surface normal of the substrates and form gratings in the grating material.
Claims21
A method, comprising:
- forming a plurality of grating regions in a substrate, comprising, for each grating region:
- positioning a first portion of a grating region in a path of an ion beam;
- projecting the ion beam at a first beam angle α to form one or more first fins having a first slant angle;
- positioning a second portion of the grating region in the path of the ion beam;
- projecting the ion beam at a second beam angle α to form one or more second fins having a second slant angle;
- positioning a third portion of the grating region in the path of the ion beam;
- and
- projecting the ion beam at a third beam angle α to form one or more third fins having a third slant angle, wherein, in a first grating region included in the plurality of grating regions, the first fins, the second fins, and the third fins extend along a first major axis having a first orientation, and, in a second grating region included in the plurality of grating regions, the first fins, the second fins, and the third fins extend along a second major axis having a second orientation that is different than the first orientation.
5 more elements
A method, comprising:
- disposing a substrate on a platen;
- and
- forming a plurality of grating regions in the substrate, comprising, for each grating region:
- positioning the platen so a first portion of a grating region of the substrate is in a path of an ion beam, the substrate having a grating material disposed thereon;
- projecting the ion beam at a first beam angle α;
- forming the first portion of a grating with one or more first fins having a first slant angle in the grating material;
- positioning the platen so a second portion of the grating region is in the path of the ion beam;
- projecting the ion beam at a second beam angle α;
- forming the second portion of the grating with one or more second fins having a second slant angle in the grating material;
- positioning the platen so a third portion of the grating region is in the path of the ion beam;
- projecting the ion beam at a third beam angle α;
- and
- forming the third portion of the grating with one or more third fins having a third slant angle in the grating material, wherein, in a first grating region included in the plurality of grating regions, the first fins, the second fins, and the third fins extend along a first major axis having a first orientation, and, in a second grating region included in the plurality of grating regions, the first fins, the second fins, and the third fins extend along a second major axis having a second orientation that is different than the first orientation.
10 more elements
A method, comprising:
- forming a plurality of grating regions in a substrate, comprising, for each grating region:
- positioning a first portion of a grating region of the substrate in a path of an ion beam, the substrate having a grating material disposed thereon;
- projecting the ion beam at a first beam angle α;
- forming the first portion of a grating with one or more first fins having a first slant angle in the grating material;
- positioning a second portion of the grating region in the path of the ion beam;
- projecting the ion beam at a second beam angle α;
- forming the second portion of the grating with one or more second fins having a second slant angle in the grating material;
- positioning a third portion of the grating region is in the path of the ion beam;
- projecting the ion beam at a third beam angle α;
- and
- forming the third portion of the grating with one or more third fins having a third slant angle in the grating material, wherein, in a first grating region included in the plurality of grating regions, the first fins, the second fins, and the third fins extend along a first major axis having a first orientation, and, in a second grating region included in the plurality of grating regions, the first fins, the second fins, and the third fins extend along a second major axis having a second orientation that is different than the first orientation.
8 more elements
Dependencies are inferred from the claim text.