H01J 2237/10
Lenses
H01J2237/10 (Lenses) appears on 642 US grants and 720 published applications in this corpus.
Search patents in H01J- Granted patents
- 642
- Published applications
- 720
- Assignees
- 181
- Inventors
- 1,079
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 2 | 0 |
| 1992 | 4 | 0 |
| 1993 | 4 | 0 |
| 1994 | 2 | 0 |
| 1995 | 4 | 0 |
| 1996 | 5 | 0 |
| 1997 | 2 | 0 |
| 1998 | 5 | 0 |
| 1999 | 0 | 0 |
| 2000 | 5 | 0 |
| 2001 | 5 | 7 |
| 2002 | 4 | 8 |
| 2003 | 10 | 7 |
| 2004 | 9 | 16 |
| 2005 | 20 | 17 |
| 2006 | 18 | 23 |
| 2007 | 11 | 14 |
| 2008 | 19 | 23 |
| 2009 | 18 | 25 |
| 2010 | 12 | 19 |
| 2011 | 22 | 25 |
| 2012 | 21 | 18 |
| 2013 | 19 | 25 |
| 2014 | 33 | 33 |
| 2015 | 39 | 59 |
| 2016 | 43 | 42 |
| 2017 | 37 | 39 |
| 2018 | 35 | 26 |
| 2019 | 29 | 36 |
| 2020 | 38 | 48 |
| 2021 | 37 | 31 |
| 2022 | 23 | 33 |
| 2023 | 31 | 44 |
| 2024 | 22 | 37 |
| 2025 | 25 | 37 |
| 2026 | 23 | 28 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Assessment system, method of assessing6 Oct 2026US 12,755,929 B2ASML Netherlands B. V.
- Adjustable permanent magnetic lens having thermal control device11 Aug 2026US 12,706,270 B2IMS Nanofabrication GmbH
- Detector substrate for use in a charged particle multi-beam assessment tool11 Aug 2026US 12,706,272 B2ASML Netherlands B. V.
- Manipulator, manipulator array, charged particle tool, multi-beam charged particle tool, and method of manipulating a charged particle beam4 Aug 2026US 12,700,561 B2ASML Netherlands B. V.
- Objective lens array assembly, electron-optical system, electron-optical system array, method of focusing4 Aug 2026US 12,700,566 B2ASML Netherlands B. V.
- Ion implanter and ion implantation method24 Sep 2026US 2026/0290748 A1Sumitomo Heavy Industries Material Solutions Co., Ltd.
- Rapid mode switching of charged-particle-beam devices13 Aug 2026US 2026/0237595 A1
- Charged Particle Beam Device6 Aug 2026US 2026/0229443 A1Hitachi High-Tech Corporation
- Vertically oriented implanter architecture for contactless backside substrate processing6 Aug 2026US 2026/0229445 A1
- Objective lens cooling system30 Jul 2026US 2026/0221375 A1ASML Netherlands B. V.
Most cited
By later US patents
- Particle-optical projection system1,466US 7,388,217 B2IMS Nanofabrication GmbH · 2008
- Apparatus for generating a plurality of beamlets112US 7,129,502 B2Mapper Lithography IP B.V. · 2006
- Objective lens with deflector plates immersed in electrostatic lens field110US 8,698,093 B1KLA-Tencor Corporation · 2014
- Particle-optical systems and arrangements and particle-optical components for such systems and arrangements98US 7,244,949 B2Applied Materials Israel Ltd. · 2007
- Multi-lens type electrostatic lens, electron beam exposure apparatus and charged beam applied apparatus using the lens, and device manufacturing method using these apparatuses92US 6,617,595 B1Canon Kabushiki Kaisha · 2003