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US 2026/0221375 A1Published application
Objective lens cooling system
AssigneeASML Netherlands B.V.
InventorsPaul CASUCCI, Xiaoyu JI, Le YU, Xingtian TAO
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Abstract
An improved magnetic lens cooling system is disclosed. A magnetic lens assembly can comprise a coil, a housing containing the coil, and a pole piece that is isolated from the housing such that there is a gap between the housing and the pole piece. Wherein the magnetic lens assembly can be configured to have a vacuum pressure in the gap.
Claims20
A magnetic lens assembly comprising:
- a coil;
- a housing containing the coil;
- and
- a pole piece that is isolated from the housing such that there is a gap between the housing and the pole piece,
- wherein the magnetic lens assembly is configured to have a vacuum pressure in the gap.
2 more elements
A charged-particle beam inspection apparatus comprising:
- a charged-particle beam source configured to generate a primary charged-particle beam for sample scanning;
- and
- an objective lens assembly configured to influence the charged particle beam, the objective lens assembly comprising:
- a coil;
- a housing containing the coil;
- and
- a pole piece that is isolated from the housing such that there is a gap between the housing and the pole piece,
- wherein the objective lens assembly is configured to have a vacuum pressure in the gap.
5 more elements
Dependencies are inferred from the claim text.