Manipulator, manipulator array, charged particle tool, multi-beam charged particle tool, and method of manipulating a charged particle beam

A manipulator array for manipulating a charged particle multi-beam, the manipulator array comprising:

• manipulators provided in a substrate having opposing major surfaces, wherein each of the manipulators is defined by an aperture at each of the opposing major surfaces and a through-passage having an interconnecting surface extending between the apertures of the opposing major surfaces;
• wherein each interconnecting surface comprises one or more electrodes;
• each manipulator further comprising a potential divider comprising two or more resistive elements connected in series, the potential divider comprising an intermediate node between each pair of adjacent resistive elements, wherein at least one resistive element is formed within the substrate so as to extend between the opposing major surfaces of the substrate;
• wherein the intermediate node is electrically connected to at least one of the one or more electrodes.