H01J 2237/06325
Cold-cathode sources
H01J2237/06325 (Cold-cathode sources) appears on 329 US grants and 356 published applications in this corpus.
Search patents in H01J- Granted patents
- 329
- Published applications
- 356
- Assignees
- 175
- Inventors
- 756
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 2 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 3 | 0 |
| 1995 | 3 | 0 |
| 1996 | 3 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 4 | 0 |
| 2000 | 2 | 0 |
| 2001 | 1 | 6 |
| 2002 | 1 | 3 |
| 2003 | 1 | 5 |
| 2004 | 7 | 14 |
| 2005 | 8 | 11 |
| 2006 | 13 | 11 |
| 2007 | 7 | 12 |
| 2008 | 9 | 15 |
| 2009 | 13 | 17 |
| 2010 | 12 | 14 |
| 2011 | 11 | 14 |
| 2012 | 10 | 8 |
| 2013 | 11 | 20 |
| 2014 | 20 | 7 |
| 2015 | 12 | 11 |
| 2016 | 12 | 14 |
| 2017 | 12 | 8 |
| 2018 | 18 | 10 |
| 2019 | 10 | 22 |
| 2020 | 23 | 18 |
| 2021 | 17 | 21 |
| 2022 | 12 | 24 |
| 2023 | 19 | 30 |
| 2024 | 13 | 17 |
| 2025 | 24 | 12 |
| 2026 | 4 | 12 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Electron beam applicator and creation method of detection data in electron beam applicator15 Sep 2026US 12,738,441 B2Photo electron Soul Inc.
- Electron emission methods to generate electron beams with a narrow energy distribution25 Aug 2026US 12,719,005 B2The Regents of the University of California
- Multiple electron beam optics21 Jul 2026US 12,688,993 B2Applied Materials Israel Ltd.
- Charged particle assessment tool, inspection method10 Feb 2026US 12,548,735 B2ASML Netherlands B. V.
- Charged particle beam apparatus and control method for charged particle beam apparatus16 Dec 2025US 12,500,064 B2JEOL Ltd.
- Applied electron beam device and electron beam generation method3 Sep 2026US 2026/0260838 A1Hitachi High-Tech Corporation
- Electron Beam Application Device20 Aug 2026US 2026/0245828 A1Hitachi High-Tech Corporation
- Systems and methods for petahertz optoelectronics13 Aug 2026US 2026/0235539 A1Georg-August-Universität Göttingen Stiftung Öffentlichen Rechts
- Insulator, Charged Particle Gun, and Charged Particle Beam Device6 Aug 2026US 2026/0229440 A1Hitachi High-Tech Corporation
- Charged Particle Beam Device6 Aug 2026US 2026/0229443 A1Hitachi High-Tech Corporation
Most cited
By later US patents
- Laser stimulated high current density photoelectron generator and method of manufacture235US 4,460,831 AThermo Electron Corporation · 1984
- Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams156US 5,892,224 ANikon Corporation · 1999
- Pattern inspection apparatus and electron beam apparatus86US 5,557,105 AFujitsu Limited · 1996
- Generating electrons with an activated photocathode68US 7,015,467 B2APPLIED Materials.Inc. · 2006
- Microtip-controlled nanostructure fabrication and multi-tipped field-emission tool for parallel-process nanostructure fabrication64US 5,126,574 AThe United States of America as represented by the Secretary of Commerce · 1992