Insulator, Charged Particle Gun, and Charged Particle Beam Device
AssigneeHitachi High-Tech Corporation
InventorsShuhei ISHIKAWA, Hiroshi MORITA, Daigo KOMESU, Takashi DOI, Tatsuya MIYAKE, Soichi KATAGIRI, Yasushi YAMANO, Takashi NAITO
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Abstract
An object of the disclosure is to provide an insulator capable of shortening a conditioning time and reducing a withstand voltage failure when a voltage difference between electrodes is about several 10 kV. The insulator according to the disclosure includes an insulating material portion and a glass film, and a boundary between the insulating material portion and an end portion of a cathode on a side facing an anode is covered with the glass film
Claims12
-13. (canceled)
An insulator disposed between a cathode and an anode with respect to the cathode in a vacuum container, the insulator comprising:
- an insulating material portion disposed below each of the cathode and the anode;
- and
- a glass film disposed to cover a boundary between the insulating material portion and an end portion of the cathode on a side facing the anode, wherein
- the glass film is made of a material containing at least one of semi-conductive glass or semi-conductive low-melting point metallic glass,
- a region not covered with the glass film is disposed between the cathode and the anode,
- a thickness of the glass film is larger than a maximum peak height of the cathode,
- a radius of curvature of a shape of the glass film in the end portion is larger than a radius of curvature of a protrusion portion formed by a surface roughness of the cathode in the end portion.
Dependencies are inferred from the claim text.