Position of mark on substrate, i.e. position in of mark

Official title: {Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels}

G03F9/7084 (Position of mark on substrate, i.e. position in of mark) appears on 650 US grants and 644 published applications in this corpus.