Adjustment method, imprint method, article manufacturing method, and imprint apparatus
AssigneeCanon Kabushiki Kaisha
InventorMasato Ito
Life of this patent
Estimating the term…
Abstract
The present disclosure provides an adjustment method for an imprint apparatus that forms a pattern to an imprint material on a substrate held by a stage, by using a mold held by a mold holder, the method comprising: estimating a position of a member held by the mold holder, as a first position, based on a result of detecting a relative position between a mark on the member and a mark on the stage with a detector; estimating a position of the member, as a second position, based on a result of measuring a surface height distribution of the member held by the mold holder with a measurement device; and determining an offset of the measurement device based on the estimated first and second positions.
Claims10
An adjustment method for an imprint apparatus that forms a pattern to an imprint material on a substrate held by a stage, by using a mold held by a mold holder, the method comprising:
- estimating a position of a member held by the mold holder, as a first position, based on a result of detecting a relative position between a mark on the member and a mark on the stage with a detector;
- estimating a position of the member, as a second position, based on a result of measuring a surface height distribution of the member held by the mold holder with a measurement device;
- and
- determining an offset of the measurement device based on the estimated first and second positions.
An imprint apparatus that forms a pattern to an imprint material on a substrate by using a mold, the apparatus comprising:
- a mold holder configured to hold the mold;
- a stage configured to hold the substrate;
- a detector configured to detect a relative position between a mark on the mold and a mark on the substrate;
- a measurement device configured to measure a surface height distribution of the mold;
- and
- a controller configured to
- estimate a position of a member held by the mold holder, as a first position, based on a result of detecting a relative position between a mark on the member and a mark on the stage with the detector,
- estimate a position of the member, as a second position, based on a result of measuring a surface height distribution of the member held by the mold holder with the measurement device, and
- determine an offset of the measurement device based on the estimated first and second positions.
Dependencies are inferred from the claim text.