G03F 9/7015
Reference, i.e. alignment of original or workpiece with respect to a reference
Official title: {Reference, i.e. alignment of original or workpiece with respect to a reference not on the original or workpiece}
G03F9/7015 (Reference, i.e. alignment of original or workpiece with respect to a reference) appears on 154 US grants and 144 published applications in this corpus.
Search patents in G03F- Granted patents
- 154
- Published applications
- 144
- Assignees
- 50
- Inventors
- 240
- Latest grant
- 12 Aug 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 3 | 0 |
| 1999 | 2 | 0 |
| 2000 | 6 | 0 |
| 2001 | 5 | 6 |
| 2002 | 5 | 6 |
| 2003 | 9 | 6 |
| 2004 | 8 | 10 |
| 2005 | 7 | 18 |
| 2006 | 15 | 10 |
| 2007 | 10 | 10 |
| 2008 | 8 | 10 |
| 2009 | 5 | 6 |
| 2010 | 3 | 5 |
| 2011 | 3 | 3 |
| 2012 | 9 | 4 |
| 2013 | 3 | 6 |
| 2014 | 4 | 2 |
| 2015 | 4 | 3 |
| 2016 | 6 | 1 |
| 2017 | 2 | 4 |
| 2018 | 6 | 2 |
| 2019 | 4 | 12 |
| 2020 | 9 | 6 |
| 2021 | 5 | 3 |
| 2022 | 2 | 0 |
| 2023 | 3 | 4 |
| 2024 | 1 | 1 |
| 2025 | 3 | 2 |
| 2026 | 0 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Exposure apparatus and method548US 6,341,007 B12002
- Exposure apparatus and method473US 6,590,634 B1Nikon Corporation · 2003
- Projection exposure apparatus and method398US 6,400,441 B1Nikon Corporation · 2002
- Exposure apparatus and an exposure method321US 6,549,269 B1Nikon Corporation · 2003
- Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement318US 5,646,413 ANikon Corporation · 1997