G03F 7/70975
Assembly, maintenance, transport or storage of apparatus
Official title: {Assembly, maintenance, transport or storage of apparatus}
G03F7/70975 (Assembly, maintenance, transport or storage of apparatus) appears on 305 US grants and 409 published applications in this corpus.
Search patents in G03F- Granted patents
- 305
- Published applications
- 409
- Assignees
- 57
- Inventors
- 722
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 2 |
| 2002 | 3 | 6 |
| 2003 | 2 | 9 |
| 2004 | 7 | 10 |
| 2005 | 6 | 13 |
| 2006 | 12 | 11 |
| 2007 | 5 | 16 |
| 2008 | 8 | 21 |
| 2009 | 9 | 15 |
| 2010 | 5 | 12 |
| 2011 | 10 | 18 |
| 2012 | 8 | 15 |
| 2013 | 12 | 15 |
| 2014 | 17 | 15 |
| 2015 | 12 | 13 |
| 2016 | 26 | 19 |
| 2017 | 16 | 19 |
| 2018 | 22 | 17 |
| 2019 | 20 | 16 |
| 2020 | 11 | 13 |
| 2021 | 13 | 15 |
| 2022 | 12 | 20 |
| 2023 | 14 | 30 |
| 2024 | 11 | 22 |
| 2025 | 15 | 25 |
| 2026 | 20 | 22 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Digital photolithography system, components thereof and related methods22 Sep 2026US 12,743,029 B2APPLIED Materials.Inc.
- Point of use solvent mixing for film removal11 Aug 2026US 12,704,785 B2Tokyo Electron Limited
- Mitigating long-term energy decay of laser devices11 Aug 2026US 12,704,792 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Combined dispensing and stamping apparatus and method for applying adhesive fluid during a bonding process4 Aug 2026US 12,699,316 B2Asmpt Singapore Pte. Ltd.
- Method for particle beam-induced processing of a defect of a microlithographic photomask7 Jul 2026US 12,676,283 B2Carl Zeiss SMT GmbH
- Lithography tool and method thereof1 Oct 2026US 2026/0299443 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Computer-implemented method and apparatus for processing a sample with a nanomanipulator17 Sep 2026US 2026/0277119 A1
- Method of manufacturing an electrode for an object holder3 Sep 2026US 2026/0259512 A1ASML Netherlands B. V.
- Component for a system of semiconductor technology and method for producing a component for a system of semiconductor technology20 Aug 2026US 2026/0244112 A1Carl Zeiss SMT GmbH
- Microlithographic projection exposure system13 Aug 2026US 2026/0235968 A1
Most cited
By later US patents
- Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method557US 8,072,578 B2Nikon Corporation · 2011
- Refractive projection objective with a waist106US 6,891,683 B2Carl Zeiss SMT GmbH · 2005
- Very-high aperture projection objective83US 7,154,676 B2Carl Zeiss SMT GmbH · 2006
- Very-high aperture projection objective83US 7,339,743 B2Carl Zeiss SMT GmbH · 2008
- Projection exposure apparatus48US 6,341,006 B12002