US 2026/0277119 A1 · COMPUTER-IMPLEMENTED METHOD AND APPARATUS FOR PROCESSING A SAMPLE WITH A NANOMANIPULATOR

Abstract

A computer-implemented method for processing a sample arranged on a sample stage with a nanomanipulator comprising a tip for processing the sample and a positioning unit for moving the tip, the method comprising the following steps: focusing (S10) an image provided by an image recording device on the tip and/or the sample; selecting (S11) the sample or the tip as a target feature; and automatically setting (S12) a focal point of the nanomanipulator based on at least one operating parameter of one of the sample stage and the positioning unit indicative of a vertical movement of the sample stage and/or the positioning unit, respectively, so as to keep the target feature focused within the image provided by the image recording device during processing.

Claims21

Dependent claims

A method, in particular a computer-implemented method, for processing a sample arranged on a sample stage with a nanomanipulator comprising a tip for processing the sample and a positioning unit for moving the tip, the method comprising the following steps:

focusing an image provided by an image recording device on the tip and/or the sample;
selecting the sample or the tip as a target feature;
and
automatically setting a focal point of the nanomanipulator based on at least one operating parameter of one of the sample stage and the positioning unit indicative of a vertical movement of the sample stage and/or the positioning unit, respectively, so as to keep the target feature focused within the image provided by the image recording device during processing.

1 more element

A computer-implemented method for processing a sample with a nanomanipulator comprising a measuring tip for processing the sample and a positioning unit for moving the measuring tip, the method comprising the following steps:

a) providing permitted value ranges for two or more parameters of the nanomanipulator and/or of the sample, wherein the two or more parameters span a multidimensional parameter space,
b) ascertaining a permitted region in the multidimensional parameter space based on the provided permitted value ranges for the two or more parameters,
c) receiving current values and/or ascertaining future values of the two or more parameters,
d) ascertaining whether a state point corresponding to the current and/or future values of the two or more parameters in the multidimensional parameter space lies outside the permitted region, and
e) controlling the positioning unit in order to stop a movement of the measuring tip and/or in order to withdraw the measuring tip in relation to the sample if it is ascertained that the state point lies outside the permitted region.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

19/657,870Filed 24 Apr 2026

Priority

DE 102023129684.127 Oct 2023

Published

17 Sep 2026

Term ends

Not estimatedThe source records don’t support an estimate.

Classification6 codes

G03F 7/706837
Metrology information management or control: data analysis, e.g. filtering, weighting, flyer removal, fingerprints or root cause analysis
G03F 7/7065
Monitoring the printed patterns: defects, e.g. optical inspection of patterned layer for defects
G03F 7/70655
Metrology techniques: non-optical, e.g. atomic force microscope [AFM] or critical dimension scanning electron microscope [CD-SEM]
G03F 7/706851
Metrology apparatus: detection branch, e.g. detector arrangements, polarisation control, wavelength control or dark/bright field detection

Computer-implemented method and apparatus for processing a sample with a nanomanipulator

Life of this patent

Computer-implemented method and apparatus for processing a sample with a nanomanipulator

Life of this patent

Abstract

Claims21