Microlithographic projection exposure system
OwnerAlexander VOELTER, Thomas WOLFSTEINERinventors
Life of this patent
Estimating the term…
Abstract
A microlithographic projection exposure apparatus comprises an illumination system, a projection lens, and an actuator for adjusting an operating parameter of an optical element of the illumination system or an optical element projection lens. The apparatus also comprises an input interface for electrical control of the actuator. An electrical control path between the input interface and the actuator passes through a printed circuit board. The printed circuit board is in an interior of a housing equipped with a cooling channel. The printed circuit board is detachably connected to the housing such that the printed circuit board is separable from the housing without opening the cooling channel.
Claims20
A microlithographic projection exposure apparatus having an object field in an object plane and an image field in an image plane, the projection exposure apparatus comprising:
- an illumination system comprising a first set of optical elements configured to direct electromagnetic radiation to the object field so that, when a first object is present in the object field, the first object is illuminated with the electromagnetic radiation;
- a projection lens comprising a second set of optical elements configured so that, when the first object is in the object field and a second object is in the image field, the first object is imaged onto the second object;
- an actuator configured to adjust an operating parameter of an optical element selected from the group consisting of the first set of optical elements and the second set of optical elements;
- an input interface configured to electrically control the actuator;
- a housing having a structure with an interior;
- a printed circuit board module detachably connected to the housing so that the printed circuit board module is separable from the housing, the printed circuit board module comprising:
- a printed circuit board in the interior of the housing, the printed circuit board being in an electrical control path between the input interface and the actuator;
- and
- a cooling plate thermally coupled to the printed circuit board, the cooling plate supported by a bearing surface of the structure of the housing.
Dependencies are inferred from the claim text.