Component for a system of semiconductor technology and method for producing a component for a system of semiconductor technology
AssigneeCarl Zeiss SMT GmbH
InventorsArvid MACZEYZIK, Martin ELMER
Life of this patent
Estimating the term…
Abstract
A component (36, Mi) for a system of semiconductor technology (1) is provided with at least one electronic component containing information with respect to the component (36, Mi), for the purpose of contactless data exchange (50). The electronic component for contactless data exchange (50) is reversibly attached to the component (36, Mi).
Claims17
A component assembly for a semiconductor technology apparatus, comprising a component and at least one electronic component part configured for contactless data exchange that comprises information relating to the component, and a reversible attachment connecting the electronic component part for contactless data exchange to the component.
A method for producing a component assembly for a semiconductor technology apparatus, comprising:
- providing a component with an electronic component part for contactless data exchange,
- providing information relating to the component to the electronic component part for contactless data exchange, and
- reversibly attaching the electronic component part for contactless data exchange to the component.
Dependencies are inferred from the claim text.