G03F 7/70816
Bearings
Official title: {Bearings}
G03F7/70816 (Bearings) appears on 184 US grants and 197 published applications in this corpus.
Search patents in G03F- Granted patents
- 184
- Published applications
- 197
- Assignees
- 66
- Inventors
- 332
- Latest grant
- 10 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 2 | 0 |
| 2001 | 2 | 3 |
| 2002 | 5 | 8 |
| 2003 | 8 | 12 |
| 2004 | 7 | 9 |
| 2005 | 8 | 12 |
| 2006 | 10 | 25 |
| 2007 | 6 | 7 |
| 2008 | 13 | 10 |
| 2009 | 6 | 10 |
| 2010 | 2 | 5 |
| 2011 | 9 | 12 |
| 2012 | 6 | 7 |
| 2013 | 9 | 8 |
| 2014 | 15 | 6 |
| 2015 | 9 | 12 |
| 2016 | 7 | 9 |
| 2017 | 12 | 5 |
| 2018 | 9 | 10 |
| 2019 | 9 | 5 |
| 2020 | 4 | 4 |
| 2021 | 3 | 4 |
| 2022 | 3 | 3 |
| 2023 | 0 | 2 |
| 2024 | 4 | 4 |
| 2025 | 4 | 2 |
| 2026 | 1 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Actuator device for use in a positioning system as well as such positioning system10 Mar 2026US 12,573,933 B2Vdl Enabling Technologies Group B.V.
- Three degrees of freedom (3DoFs) precision positioning wedge air bearing stage system (WABSS)1 Jul 2025US 12,345,371 B2Council of Scientific and Industrial Research
- Positioning device for positioning a movable element24 Jun 2025US 12,338,944 B2Schneeberger Holding AG
- Stage system, lithographic apparatus, method for positioning and device manufacturing method29 Apr 2025US 12,287,586 B2ASML Netherlands B. V.
- Stage apparatus and electron beam lithography system11 Feb 2025US 12,222,658 B2JEOL Ltd.
- Stage apparatus, lithography apparatus, article manufacturing method, and driving method for stage apparatus6 Aug 2026US 2026/0227712 A1Canon Kabushiki Kaisha
- Actuatable mirror assembly14 May 2026US 2026/0133402 A1
- Exposure device / tool for circuits on curved surfaces and method for preparing curved circuits12 Feb 2026US 2026/0044084 A1University of Electronic Science and Technology of China
- Individual mirror of a pupil facet mirror and pupil facet mirror for an illumination optical unit of a projection exposure apparatus19 Jun 2025US 2025/0199422 A1
- Stage and error compensation system using the same22 May 2025US 2025/0164897 A1Samsung Display Co., Ltd.
Most cited
By later US patents
- Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses483US 6,603,130 B1ASML Netherlands B. V. · 2003
- Exposure apparatus, and device manufacturing method85US 7,321,419 B2Nikon Corporation · 2008
- Exposure apparatus, and device manufacturing method75US 7,486,385 B2Nikon Corporation · 2009
- Vacuum-sealed gas-bearing assembly52US 4,191,385 A1980
- Environmental system including vacuum scavenge for an immersion lithography apparatus50US 7,456,930 B2Nikon Corporation · 2008