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US 2025/0164897 A1Published application
Stage and error compensation system using the same
AssigneeSamsung Display Co., Ltd.
InventorsJungwoong Byun, CHEONG-WAN MIN, JAIHYUK CHOI, MYUNGSOO HUH
Life of this patent
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Abstract
A stage includes a base plate extending in a first direction and a second direction intersecting the first direction, a moving frame disposed on the base plate and movable in the first direction or in a direction opposite to the first direction, and an error compensation portion disposed between the base plate and the moving frame and including a guide rail extending in the first direction and an electromagnet portion disposed on the guide rail and covering at least a portion of the guide rail.
Claims20
A stage comprising:
- a base plate extending in a first direction and a second direction intersecting the first direction;
- a moving frame disposed on the base plate and movable in the first direction or in a direction opposite to the first direction;
- and
- an error compensation portion disposed between the base plate and the moving frame, the error compensation portion including:
- a guide rail extending in the first direction;
- and
- an electromagnet portion disposed on the guide rail and covering at least a portion of the guide rail.
4 more elements
An error compensation system comprising:
- a stage,
- wherein the stage includes:
- a base plate extending in a first direction and a second direction intersecting the first direction;
- a moving frame disposed on the base plate and movable in the first direction or in a direction opposite to the first direction;
- and
- an error compensation portion disposed between the base plate and the moving frame, the error compensation portion including:
- a guide rail extending in the first direction;
- and
- an electromagnet portion disposed on the guide rail and covering at least a portion of the guide rail.
6 more elements
Dependencies are inferred from the claim text.