Back to results
US 2025/0199422 A1Published application
Individual mirror of a pupil facet mirror and pupil facet mirror for an illumination optical unit of a projection exposure apparatus
OwnerStefan LIPPOLDT, Markus HAUF +1inventors
InventorsStefan LIPPOLDT, Markus HAUF, Martin ENDRES
Life of this patent
Estimating the term…
Abstract
An individual mirror of a pupil facet mirror of an illumination optical unit of a projection exposure apparatus is mounted so as to be pivotable about two pivot axes. A ratio of the pivotability of the individual mirror about the two pivot axes is at least 2:1.
Claims20
An individual mirror of a pupil facet mirror, comprising:
- a reflection surface having a surface normal;
- a bearing configured to enable a pivoting movement of the individual mirror about first and second pivot axes, the first and second pivot axes being transverse to the surface normal;
- and
- an actuator device configured to pivot the individual mirror, wherein a ratio of the pivotability of the individual mirror about the first and second pivot axes is at least 2:1.
1 more element
Dependencies are inferred from the claim text.