Stage system, lithographic apparatus, method for positioning and device manufacturing method

An object table adapted to support an object to be positioned, the object table comprising:

• a clamping device to clamp the object;
• a plurality of burls configured to provide a support surface for the object;
• and
• a plurality of gas bearing devices arranged to support the object prior to clamping of the object on the burls, wherein each gas bearing device is in fluid communication with a source of sub-atmospheric pressure configured to pull the object towards the surface and a source of pressurized gas configured to push the object away from the surface such that a balance between the pushing force that the pressurized gas exerts on the object and the pulling force that the sub-atmospheric pressure exerts on the object allows the object to be positioned in a direction perpendicular to the surface.